INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 165)

9 - 17
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Cygnus 2 Operating Manual
9
(0x09)
Maximum Power
(%)
0.01/
99.99/ 90.0
REAL_4X2
10
(0x0a)
Minimum Power
(%)
0.00/
99.98/ 0.0
REAL_4X2
11
(0x0b)
Max Power Option 0/ 3/ 3 Encode 0 = Continue
1 = Post-Dep
2 = Stop All
3 = Stop Matl
12
(0x0c)
PreCond Soak
Power (%)
0.0/ 99.99/
0.0
REAL_4X2
13
(0x0d)
PreCond Rise Time
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
Time Note: Times are
displayed as mm:ss. Times
are stored as seconds.
The maximum number of
seconds is 5999. This
would be displayed as
99:59.
14
(0x0e)
PreCond Soak Time
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
15
(0x0f)
Soak Power 1
%
0.0/ 99.99/
0.0
REAL_4X2
16
(0x10)
Rise Time 1
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
See Time Note
17
(0x11)
Soak Time 1
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time See Time Note
18
(0x12)
Soak Power 2
%
0.0/ 99.99/
0.0
REAL_4X2
Table 9-6 Material parameters (continued)
QM
&
UM
Cmnd
ID
Name
(Units)
Range:
Low Limit/
High Limit/
Default
Data Type Notes
Update Restrictions
and Display Notes