INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 167)

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Cygnus 2 Operating Manual
34
(0x22)
Time Limit
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
See Time Note
35
(0x23)
Rate Filter Time
(seconds)
0/ 6/ 0 Encode 0 = 0.1 1 = 0.4 2 = 1.0
3 = 4.0 4 = 10.0
5 = 20.0 6 = 30.0
36
(0x24)
Time Power Avg
Time (Minutes)
0/ 30/ 0 Integer
37
(0x25)
Ion Assist Deposit 0/ 1/ 0 Encode 0 = No, 1 = Yes Update not allowed if
Material is running.
38
(0x26)
On Final Thickness 0/ 2/ 1 Encode 0 = Continue, 1 = Post-Dep
2 = NonDepCont
39
(0x27)
Ramp 1 Rate
(Å/s)
0/ 999.9/ 0 REAL_
4F31
40
(0x28)
Start Ramp 1
(KÅ)
0/ 999.999/
0
REAL_
4F31
Value must be less than Start Ramp 2 thickness
value if Start Ramp 2 thickness value is non-zero.
41
(0x29)
Ramp 1 Time
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
See Time Note
42
(0x2a)
Ramp 2 Rate
(Å/s)
0/ 999.9/ 0 REAL_
4F31
43
(0x2b)
Start Ramp 2
(KÅ)
0/ 999.999/
0
REAL_
4F31
Value must be greater than
Start Ramp 1 thickness value.
44
(0x2c)
Ramp 2 Time
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
See Time Note
45
(0x2d)
RateWatcher
Option
0/ 1/ 0 Encode 0 = No, 1 = Yes
46
(0x2e)
RateWatcher Time
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
See Time Note Grey font unless
RateWatcher option set
to Yes.
47
(0x2f)
RateWatcher
Accuracy (%)
1/ 99/ 5 Integer
Table 9-6 Material parameters (continued)
QM
&
UM
Cmnd
ID
Name
(Units)
Range:
Low Limit/
High Limit/
Default
Data Type Notes
Update Restrictions
and Display Notes