INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 112)

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Cygnus 2 Operating Manual
IDLE POWER . . . . . . . . . . . . . . . . . 0.0 to 99.99%
This value is the power level at which the Source is maintained after the
DEPOSIT state (or after Feed state if one is set up). Idle Power is usually the
same as Soak Power 1. The default value is 0%. If set to a value greater than
Maximum Power, Maximum Power has priority. The power level will be set to
zero before a crucible switch is done.
IDLE RAMP TIME . . . . . . . . . . . . . . 00:00 to 99:59 min:s
This is the time interval over which the Source power is ramped linearly from
the power level at the end of Deposit (or Feed state if one is set) to Idle Power.
The default value is 00:00.
5.1.7 Deposit Page Parameters
Figure 5-9 Material deposit page
MATERIAL NUMBER . . . . . . . . . . . 1 to 6
Change the number to edit or create a different Material
RATE . . . . . . . . . . . . . . . . . . . . . . . . 0.000 to 999.9 Å/s (default = 0.000)
NOTE: Rate = 0.000 will take a Material in control to post-Deposit state.
This specifies the rate at which the deposition is to be controlled during the
DEPOSIT and NON-DEPOSIT CONTROL states. The Rate is calculated
based on:

The rate information acquired by the Sensor in use, based on the density
and Z-Ratio values entered for this Material.
 The tooling factors that correct for any relative difference in flux distribution
reaching the Sensor used for this Material.