INFICON Cygnus 2 Thin Film Deposition Controller User Manual

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Cygnus 2 Operating Manual

If the Sensor type is XtalSix (CrystalSix) or Xtal12 (Crystal12)

XTAL POSITION FIRST . . . 0 to 6 (12 for Xtal12)

XTAL POSITION LAST. . . . 0 to 6 (12 for Xtal12)

If all available positions are to be used for this Material, set both values
to 0. Otherwise, enter values to select the set of positions to use for this
Material. Permissible values for a CrystalSix are 0 to 6, 0 to 12 for a
Crystal12. Default is 0.

If an out-of-range position condition results when a Sensor type is changed, the
position values will be defaulted to 0.

(SENSOR) FAILURE ACTION . . . . PostDp (1), Stop All (2),

Stop Matl (3), TimePw (4)

Desired process change when the Sensor fails. PostDp (1) continues into
post-deposit states. In Stop All (2), all Source control voltages will be set to
zero. In Stop Material (3), only the associated Material will enter the stop state.
Its Source control voltage will be set to zero. TimePw (4) continues to Final
Thickness using stored average power and rate. The default setting is Stop
Material (3).

CRYSTALTWO TOOLING . . . . . . . . 1.0 to 999.9%

This parameter applies only if the Sensor type is XtalTwo (CrystalTwo). Sets the
Tooling factor when a dual sensor or two single sensors are connected to the
same Sensor channel using a CrystalTwo switch. Default value is 100%.

QUALITY PERCENT . . . . . . . . . . . . 0 to 99% and >0.5 Å/s

Quality Percent selects the permissible rate deviation in percent of the
measured rate relative to the desired rate. The default value is 0% which
disables the function.