INFICON Cygnus 2 Thin Film Deposition Controller User Manual

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Cygnus 2 Operating Manual

GO TO NON-DEP ## . . . . . . . . . . . . 0 (any Material) to 6

Places the designated Material ## into the Non-Deposit Control state. This
cannot be done from the Ready, Idle, Stop, or Crucible Switch states. If the
crystal is failed, this action will place the Material into the Non-Deposit Hold
state if the previous state was Time Power, otherwise it is not allowed.

GO TO POST-DEP ## . . . . . . . . . . . 0 (any Material) to 6

This action places the designated Material ## into the Feed Ramp state. This
action cannot be done if in Crucible Switch, Ready or Stop.

INCREMENT COUNT ## . . . . . . . . . 1 to 20

Increases the count by one in the designated counter ##.

MESSAGE (ON/OFF) ## . . . . . . . . . 1 to 10

Designates the user-defined message ## and displays the message on the
screen (or removes it from being displayed). The message is displayed in the
message section of the display. Messages are defined in the General/ Message
page.

PRECOND S/H (ON/OFF) ## . . . . . . . . . . . . . . 0 (any Material) to 6

If active (ON), the designated Material ## will pause execution and maintain
PreCondition power until Pre Cond S/H (Soak Hold) is turned OFF. Commands
from Remote Comm and Logic will be independent.

RESET ##...........................................0 (any Material) to 6

This action is identical to pressing the RESET button on the front panel.

RWS INHIBIT (ON/OFF) ## . . . . . . . 0 (Any Material) to 6

When active (ON), this will prevent the designated Material ## from entering the
RateWatcher Sample state. If Sample is already active, remains in Sample until
Accuracy requirement is met. When OFF, RateWatcher Sample will be
enabled. Commands from Remote Comm and Logic will be independent.

RWS INITIATE (ON) ## . . . . . . . . . . 0 (any Material) to 6

RWS INIT (OFF) ## . . . . . . . . . . . . . 0 (any Material) to 6

When active (ON), this will start the RateWatcher sampling interval for the
designated Material ##. When OFF, RateWatcher sampling will take place at
the programmed interval based on the RateWatcher time unless RWS INHIBIT
is on. Commands from Remote Comm and Logic will be independent.

SOAK 1 HOLD (ON/OFF) ## . . . . . 0 (any Material) to 6

If active (ON), the designated Material ## will pause execution and maintain
Soak Power 1 until Soak Hold 1 is turned OFF. Commands from Remote Comm
and Logic will be independent.