INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 170)

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Cygnus 2 Operating Manual
9.4.10 Query Source Parameter
Command = QC
Command ID = See Table 9-8 .
Source Number = Source number 1 - 6
Response = |
Type of response depends on command ID, see Data Type column in Table 9-8 .
9.4.11 Update Source Parameter
Command = UC
Command ID = See Table 9-8 .
Source Number = Source number 1 - 6
Parameter Value = |
Type of value depends on command ID, see Data Type column in Table 9-8 .
Response = None (Just header and trailer)
5
(0x05)
# of Positions 1/ 12/ 1 Integer
Visible only when Sensor
Type = 4
Update not allowed if
the Sensor is running.
6
(0x06)
# of Pulses 1/ 10/ 1 Integer
7
(0x07)
Pulse On (Time)
(Seconds)
0.1/ 9.9 /1 REAL_3X1
8
(0x08)
Pulse Off (Time)
(Seconds)
0.1/ 9.9 /1 REAL_3X1
9
(0x09)
Recorder Output 0/ 12/ 0 Integer 0 = not defined Not allowed to be the
same as a Source DAC
10
(0x0a)
Recorder Function 0/ 2/ 0 Encode 0 = Unfiltered Rate
1 = Thick 2 = RateDev
Note: Rate is not
affected by Rate Filter
Time
11
(0x0b)
Recorder Range 0/
99999/
100
Integer Gray font when
Recorder Function =
Rate Deviation
Table 9-7 Sensor parameters (continued)
QS
&
US
Cmnd
ID
Name
(Units)
Range:
Low Limit/
High Limit/
Default
Data Type Notes
Update Restrictions
and Display Notes