INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 87)

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Cygnus 2 Operating Manual
NOTE: If Data Log Xtal Info Parameter is set to Yes, the following Crystal History
will be sent for each Sensor, see Table 3-3 . The Crystal history contains
the history of every crystal in every Sensor used in the Material. In the
Remote status command SL17 #, the crystal history for all twelve crystals
in all six Sensors is returned. If there is a minus sign in front of the Freq
value, it indicates that this crystal failed during the layer. The frequency
value shown in that case is the last valid reading obtained before the
crystal failed. If the General Comm Datalog Xtal Info parameter is set to
No, all zeros are sent in the remote status command SL17 #.
Table 3-3 is extended as necessary to show all crystals in a sensor.
Table 3-3 Sensor 1 to 6
Crystal Begin
Freq
End Freq BegLife EndLife Beg Activity End Activity Stability
Value
Quality
Value
1
2
3
4
5
6