4 state descriptions – INFICON Cygnus 2 Thin Film Deposition Controller User Manual
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Cygnus 2 Operating Manual
3.4 State Descriptions
Table 3-2 State descriptions
STATE
CONDITION
RELAY CONTACT
STATUS
REMOTE
COMM
ENCODES
Source
Shutter
Sensor
Shutter
1. READY
The Cygnus 2 will accept a START
command.
Inactive
Inactive
0
2. CRUCIBLE SWITCH
(Crucible Sw)
During this state, the crucible turret is
being moved from its current position to the
one called out for the given Material. If the
idle power of the Source in use is not zero
the power is set to zero before the crucible
position changes. Cygnus 2 advances to
next state when turret input goes low for
the programmed position or turret delay
has elapsed (depending on parameter
settings).
Inactive
Inactive
1
3. PRECON RISE
Source power rises to Precondition power
level over the precondition rise time.
[PreCon Rise Time]
Inactive
Inactive
2
4. PRECON SOAK
Source is maintained at precondition
power level for the precondition soak time.
[PreCon Soak Time, PreCon Soak Power]
Inactive
Inactive
3
5. RISE 1
Source is rising to Soak Power 1 level.
[Rise Time 1]
Inactive
Inactive
4
6. SOAK 1
Source is being maintained at Soak Power
1 level. [Soak Time 1, Soak Power 1]
Inactive
Inactive
5
7. RISE 2
Source is rising to Soak Power 2 level.
[Rise Time 2]
Inactive
Inactive
6
8. SOAK 2
Source is being maintained at Soak Power
2 level. [Soak Time 2, Soak Power 2]
Inactive
Inactive
7
9. SHUTTER DLY
Rate is being controlled. Advances to
Deposit State once the Source is in Rate
Control within Shutter Delay Accuracy for 5
seconds.
Inactive
Active
8
10. DEPOSIT
Rate control. [Rate, Final Thickness, PID
Control, Process Gain, Primary Time
Constant, System Dead Time]
Active
Active
9
11. RATE RAMP 1
Rate control, desired rate changing. [New
Rate 1, Start Ramp 1, Ramp Time 1]
Active
Active
10
12. RATE RAMP 2
Rate control, desired rate changing. [New
Rate 2, Start Ramp 2, Ramp Time 2]
Active
Active
11