INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 189)

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IP
N 07
4-
54
5-
P1
E
Cygnus 2 Operating Manual
5
(0x05)
Fundamental
Activity
4 or 24 or One integer for each Sensor
Range 0 - 999
6
(0x06)
Current
Z-Ratio
4 or 24 or Z-Ratio currently in use.
7
(0x07)
Anharmonic
Frequency
8 or 48 or One long integer for each Sensor.
Unconverted, to convert to Hz, multiply by
0.000873114913702011
8
(0x08)
Anharmonic
Activity
4 or 24 or One Integer for each Sensor
Range 0 - 999
9
(0x09)
New crystal
Frequency
16 or 96 or
< Long>x12
Returns the Fundamental and Anharmonic
"NEW" crystal frequencies
10
(0x1a)
LCQ value 4 or 24 or Returns the LCQ running value
(for factory diagnostic use only)
11
(0x0b)
N/A
12
(0x0c
Sensor
Thickness
4 or 24 or kÅ
Returns Sensor thickness, increments in all
states including Ready & Stop. Reset zeroes
it.
Table 9-14 Status sensor (continued)
SS
Command
ID
Description
Number
of bytes
in the
response
Data Returned Notes