INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 232)

13 - 16
IP
N 07
4-
54
5-
P1
E
Cygnus 2 Operating Manual
2. Crystal ceases to oscillate
during deposition before it
reaches the end its normal
life a. Crystal struck by
particulate or spatter from
molten source a. Thermally condition the
source thoroughly before
deposition, use a shutter to
protect the crystal during
source conditioning
b. Material on crystal holder
partially masking crystal
cover aperture b. Clean crystal holder; refer
to appropriate sensor manual
c. Existence of electrical
short or open condition c.Using an ohm meter or
DVM, check for electrical
continuity in the sensor
cable, connector, contact
springs, connecting wire
inside sensor, and
feedthroughs
d. Check for thermally
induced electrical short or
open condition d. See C above
NOTE: Crystal life is highly dependent on process conditions of rate, power radiated from
source, location, material, and residual gas composition.
3. Crystal does not oscillate
or oscillates intermittently
(both in vacuum and in air) a. Intermittent or poor
electrical contact (contacts
oxidized) a. Use an ohm meter or DVM
to check electrical continuity,
replace Ceramic Retainer
b. Leaf springs have lost
retentivity (ceramic retainer,
center insulator) b. Bend leaves to approx.
45°; refer to appropriate
sensor manual
c. RF interference from
sputtering power supply c. Verify earth ground, use
ground strap adequate for
RF ground, (solid copper
strap with 5 to 1 length to
width ratio is recommended),
change location of Cygnus 2
and oscillator cabling away
from RF power lines, connect
Cygnus 2 to a different power
line
d. Cables/oscillator not
connected, or connected to
wrong sensor input d. Verify proper connections,
and inputs relative to
programmed sensor
parameter
Table 13-7 Troubleshooting transducers/sensors (continued)
SYMPTOM CAUSE REMEDY