INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 110)

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Cygnus 2 Operating Manual
DEP AFTER PRE-DEP . . . . . . . . . . Yes (1), No (0)
Selects the state to follow the last Soak. Standard processing will continue with
Deposit. In special cases, No (0) or Non-deposit control may be appropriate. In
this state, the rate is controlled but thickness is not incremented and the Source
shutter relay is not active. Default is Yes(1) for Deposit.
CAUTION
The Sensor must be positioned so the rate can be
monitored with the Source shutter closed when going to
the non-deposit control state.
Figure 5-8 Source power level profile
DELAY OPTION. . . . . . . . . . . . . . . . None (0), Shutter (1), Control (2), Both (3)
The default value is None (0).
Shutter (1): The Source shutter relay remains in its normal state and the crystal
shutter relay is active. The Sensor, which must be positioned to sample the
source flux with the Source shutter closed, provides closed loop rate control.
The rate control must be within the specified Shutter Delay Accuracy or 0.5 Å/s
of the desired deposition rate for 5 seconds before the Cygnus 2 will enter the
DEPOSIT state, opening the Source shutter and thus exposing the substrate to
a well controlled rate of evaporant flux. If the required rate control accuracy
cannot be achieved within 60 seconds, the Material will STOP.
Control (2): Control delay suspends DEPOSIT control loop action on the
Source control power for the time interval programmed in Control Delay Time.
During Control Delay, the Source and Sensor shutters are activated.
Both (3): Cygnus 2 will first enter a shutter delay state followed by the control
delay interval.