INFICON Cygnus 2 Thin Film Deposition Controller User Manual

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Cygnus 2 Operating Manual

MATERIAL END ##

Sets the logic condition to be true when the specified Material ## enters the
IDLE state. The condition remains true until a START or a STOP ALL/RESET
command is received. Numeric inputs range from 0 to 6, with 0 indicating any
Material.

MAX POWER

Sets the logic condition to be true as long as any Source is at Max(imum)
Power. The condition remains true until every Source is less than Maximum
Power.

MIN POWER

Sets the logic condition to be true as long as any Source is at Min(imum) Power.
The condition remains true until every Source is greater than Minimum Power.

NON-DEP CONTROL

This Event is evaluated true if a Material is in the Non-Deposit Control state,
that is, there is rate control with the Source/substrate shutter closed. The
condition remains true until the end of the Non-Deposit Control state.

NON-DEP HOLD

This function is similar to Time Power except the Source/substrate shutter is
closed and there is no determinant end point. The condition remains true until
the state is exited, for example when a Stop command is given.

POST-DEPOSIT

Sets the logic condition to be true at the beginning of the Feed state or the
beginning of the Idle Ramp state. The condition remains true until a START
command is received or until a STOP/RESET sequence is executed.

PRE-COND RISE

Sets the logic condition to be true at the beginning of the Pre-Cond Rise state.
The condition remains true until the Pre-Cond Soak or a subsequent non-zero
state is entered, or until a STOP/RESET sequence is executed.

PRE-COND SOAK

Sets the logic condition to be true at the beginning of the Precond Soak state.
The condition remains true until the Rise 1 or a subsequent non-zero state is
entered, or until a STOP/RESET sequence is executed.

NOTE: This state, PRECOND RISE, RISE 1 and SOAK 1 are skipped if the

same Material was used and has a non-zero Idle power.