INFICON Cygnus 2 Thin Film Deposition Controller User Manual

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Cygnus 2 Operating Manual

SOAK 2 HOLD (ON/OFF) # . . . . . . 0 (any Material) to 6

If active (ON), the designated Material # will pause execution and maintain
Soak Power 2 until Soak Hold 2 is turned OFF. Commands from Remote Comm
and Logic will be independent.

START ##............................................0(any Material) to 6

This action is identical to pressing the START button on the front panel.

START DEPOSIT ## . . . . . . . . . . . . 0 (any Material) to 6

This function is used to place the designated Material ## into Deposit from the
NONDEP CNTL state and zero the thickness. If the crystal is failed, this
command will make the Material go into Time Power if the previous state was
Non-Deposit Hold, otherwise the action is not allowed. Cannot be done from
Ready, Idle, Stop, Crystal Switch, or Crucible Switch. When in Ready or Stop,
use the Start action.

START INHBT (ON/OFF) . . . . . . . . ON/OFF

This feature, when active, prohibits the START of a Material. It does not inhibit
the START DEPOSIT function. Once START INHIBIT is ON, a Material cannot
be started until the START INHIBIT is deactivated (set to OFF). Commands
from Remote Comm and Logic will be independent. START INHIBIT will carry
through a power cycle

START TIMER ## . . . . . . . . . . . . . . 1 to 20

Starts the designated timer ##.

STOP ## . . . . . . . . . . . . . . . . . . . . . 0 (all Materials) to 6

Sets Source power for the designated Material ## to zero and freezes its rate
and thickness values until a Start is received.

SWITCH XTAL ## . . . . . . . . . . . . . . 1 to 6

This action activates the Crystal Switch output for the Sensor number #
indicated. It indexes to the next crystal position listed when using a
multi-position sensor. This function is available only if a multi-position sensor
type is chosen in Sensor Set Up.

TRIG FNL THICK ## . . . . . . . . . . . . 0 (any Material) to 6

This action triggers Final Thickness for the designated Material ## and the
Material proceeds to the Feed Ramp or Idle Ramp state. This action is ignored
if not in the Deposit state.

XTL FL INHB (ON/OFF) ## . . . . . . . 0 (any Sensor) to 6

When set to On, this action prohibits the Crystal Fail logic event from becoming
active for the designated Sensor number, but has no effect on crystal switching
or Sensor failure action. This is useful when changing crystals. Commands
from Remote Comm and Logic will be independent.