INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 85)

MDC-360 DEPOSITION CONTROLLER
5-11 OPERATING THE MDC-360
5.9.1.14 RATE DEV. ALERT
The deposition rate deviation is greater than the value set in the Rate Deviation
Alert parameter.
5.9.1.15 MAX POWER ALERT
Indicates that the power output level has been at the Maximum Power level longer
than the time period set in the Power Alert Delay parameter.
5.9.1.16 MIN POWER ALERT
.9.1.18 XTAL FAIL SWITCH
This message indicate ensor input has
been switche kup cryst on, n war nds.
Press any key to clear the sound.
5.9.1.1 ITCH
This message indicates the primary crystal is marginal and the sensor input has
been
stal. I ddition, the
Press any key to clear the sound.
5.9.1.20 RATE DEV. ATTEN
The deposition rate deviation error is greater than the value set in the Rate
Deviation Attention parameter.
5.9.1.21 MAXIMUM POWER
The output power is being limited by the value set in the Maximum Power
parameter.
5.9.1.22 MINIMUM POWER
The output power is at or below the minimum power set by the Minimum Power
parameter.
5.9.1.23 CHANGE POCKET...
Prompts the operator to switch the source pocket to the correct position. The
process will be on hold until the Start key is pressed. There is no message if the
Control parameter is set to Auto (Source Setup Menu).
Indicates that the power output level has been at or below the Minimum Power
level longer than the time period set in the Power Alert Delay parameter.
5.9.1.17 ALERT ACTION
This message indicates the Alert sound was initiated by an internal action.
5
s the primary crystal has failed and the s
d to the bac al. In additi the Attentio ning sou
9 XTAL MRGN SW
switched to the backup cry n a Attention warning sounds.