INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 42)

MDC-360 DEPOSITION CONTROLLER
4-10 PROGRAMMING AND CONTROLLER SETUP
Monitor” for future identification. Note the I/O card and the pin numbers
of the input so you can later connect the input to the optical monitor.
xt, go to the Program Actions screen and select any action labeled “No
Action”. Press the right arrow key with the cursor on the action Nam
parameter and select the TerminateDeposit action. Move the curs
Conditions fi
Ne
e
or to the
eld and press the 0 key to add a condition. Move the cursor
n
No
Sub
the I/O card number and the pin numbers of the
Next, move the cursor onto the Conditions field and press the 0 key to add
e cursor on the State condition type, press the right
first
he
1 state then your condition string would look like this “Predeposit
Hold|Deposit 1”.
ue
set
ller will stop at the end of each layer and wait for a Start key
to
The
you
of
mat t
sett efine is disabled when
left at the default. This section will list the material parameters typically set for
down to the Input condition type, press the right arrow key, move the
cursor onto the “Optical Monitor” input and press enter. Press enter agai
to complete the condition string.
w, the MDC-360 will terminate the deposit whenever the “Optical
Monitor” input is set true by the optical monitor.
strate Heat Control - To create an output in the MDC-360 to switch on
and off a substrate heat controller, first go to the Program Outputs screen
and select a blank output. Name the output “Substrate Heat” for future
identification. Note
output so you can later connect the output to the substrate heater
controller.
a condition. With th
arrow key and select the state in which you would like the heater to
turn on. If you would like the heater on during more than the one state,
then press the 5 key to add an or “|” symbol then press 0 to add the next
desired state. Repeat this process until all of the states requiring substrate
heat have been added to the condition. For example, if you would like
substrate heat to start in the Predeposit Hold state and continue through t
Deposit
With the condition string completed, the MDC-360 will set this output tr
when ever it is in the selected states.
4.2.6 DISPLAY SETUP
The only parameter in the Display Setup menu that affects the controller’s
function is the Pause On Layer Complete parameter. This parameter determines
whether or not the controller will pause at the completion of each layer. When
to Yes, the contro
press before continuing. When set to No, the controller will immediately go
the next layer.
4.2.7 MATERIAL SETUP
next step in the initial setup of the controller is to define the materials that
wish to deposit. Because of its many features, the MDC-360 has a long list
erial parameters which at first can be overwhelming. Fortunately, the defaul
ings of most parameters are such that the feature they d