INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 20)

MDC-360 DEPOSITION CONTROLLER
2.1.6 TIME TO GO
Time To Go is displayed in hours, minutes and seconds. This display can be
configured to show the estimated state or layer time or the elapsed process, lay
or state times.
2.2 PARAMETER/STATUS DISPLAYS
A graphics display labeled Parameter/Status is used for process programming and
controller setup as w
er
ell as displaying run time status and data graphing. The
operator can switch between programming screens and status screens by
the Program and Status keys on the front panel. Upon power up, the
Parameter/Status display automatically reverts to the last viewed status screen.
Detail descriptions of the different programming and status screens can be found
in Section 4 and 5. pressing
Sample Cr Process Ready
10
R
a
1
Figure 2-2 Parameter/Status Display
2.3 OPERATING CONTROLS
al,
s,
s.
ng
lled through the Remote Power Handset. In the Manual mode the control
ote
last value
prior to entry and is thereafter modified only through the Remote Power Handset.
Exit from the manual mode is accomplished by means of the Manual or Reset
key.
The MDC-360 can also be aborted through the Remote Power Handset. This
abort feature is active whether or not MDC-360 is in the manual mode.
Normal operation of the MDC-360 is controlled by seven operating keys, Manu
Start, Abort, Reset, Zero, Shutter and Status. Except for the Zero and Status key
each of the other keys is equipped with an LED to indicate the controller’s statu
2.3.1 MANUAL KEY
This key is used to toggle the MDC-360 Manual mode on and off. A red light
behind this key indicates the controller is in manual power control mode. This
mode may be selected at any time providing that the controller is not in Abort
mode. The Manual mode indicates that the source control voltage output is bei
contro
voltage remains constant unless incremented up or down by means of the Rem
Power Handset. At entry into the Manual mode, the power is left at the
t
e
0
Displays the current
process name.
Displays the current
material name.
Displays the
controller modes,
states or troubles.
Displays the ti
axis scale facto me
r
FRONT PANEL DISPLAYS AND CONTROLS 2-2