INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 39)

MDC-360 DEPOSITION CONTROLLER
4-7 PROGRAMMING AND CONTROLLER SETUP
BCD - Binary Coded Decimal position feedback. This feedback type
ht pocket source would use
IN
should go true (closed to
4.2.4
The fol -360 is setup to control the
fou
Sin for a
Sin
)
the relay will close to open the shutter. A relay output called
the
Du ensor
hea
“Du
sen
Autom in the material menu by
sett
num
r
num
The ple
cry
cry
Multip
auto
a. Manual Crystal Pos
ill
f each layer instructing the operator to change
sensor N to the required crystal number.
uses binary coding to indicate the pocket position. Inputs are numbered
most significant bit first. For example, an eig
three inputs. With pocket one in position, all inputs will be false. With
pocket four in position, inputs one and two will be true and input three
will be false.
SNGL HOME - Single home position feedback. This feedback type uses one
input. The input is normally false (open circuit) and should go true
(closed to ground) when pocket one is in position.
POSITION - In position feedback. This feedback type uses one input.
The input is normally false (open circuit) and
ground) when the desired pocket is in position.
SENSOR SETUP
lowing examples demonstrate how the MDC
r basic types of crystal sensor heads available:
gle Crystal Sensor Head - No sensor parameters need to be changed
single crystal sensor head.
gle Crystal Sensor Head with Shutter - For a single shuttered sensor
head, set the Shutter Relay Type parameter to either N.O. (normally open
or N.C. (normally closed). The typical setting is normally open which
means that
“SensorN Shutter” will be created that should be connected between
sensor shutter actuator and power supply.
al Crystal Sensor Head with Shutter - For a dual crystal shuttered s
d, set the Shutter Relay Type parameter to Dual. A relay output called
alSnsr1&2 Shtr” will be created that should be connected between the
sor shutter actuator and power supply.
atic crystal switching upon failure is enabled
ing the Crystal Fail parameter to Switch and the Backup Sensor
ber to 2. Note that with the dual sensor head you define the senso
ber that you would like to use, (or switch too) not the crystal number.
crystal number need only be defined when you are using a multi
stal sensor head(sensor head with one BNC output and more than one
stal).
le Crystal Sensor Head - The MDC-360 can be setup for either
matic or manual control of multiple crystal sensor heads.
ition Control - For manual crystal position
control of a multiple crystal sensor head, set the Number of Crystals
parameter to the correct number of crystals. Once set, a message w
appear at the start o