Material, Material -3 – INFICON MDC-360 Thin Film Deposition Controller User Manual
Page 163
MDC-360 DEPOSITION CONTROLLER
14.1 MATERIAL
Material Nu
mber
Material Na
me
Sensor #
Crystal #
Source #
Pocket #
Material De sity
n
Acoustic Impedance
Tooling Factor
Proportional gain
Integral Time constant
Derivative Time constant
Rise to Soak Time
Soak Power
Soak Time
Rise to Predeposit Time
Predeposit Power
Predeposit Time
Rate Establish Time
Rate Establish Error
Deposition Rate 1
Rate Ramp Start 1
Rate Ramp Stop 1
Deposition Rate 2
Rate Ramp Start 2
Rate Ramp Stop 2
Deposition Rate 3
Rate Ramp Start 3
Rate Ramp Stop 3
Deposition Rate 4
Rate Ramp Start 4
Rate Ramp Stop 4
Deposition Rate 5
Time Setpoint
Ramp to Feed Time
Feed Power
Feed Time
Ramp to Idle Time
Idle Power
SYSTEM:
ENTERED BY:
APPROVED BY:
DATE:
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