INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 46)

MDC-360 DEPOSITION CONTROLLER
4-14 PROGRAMMING AND CONTROLLER SETUP
Figure 4-2 Select Process screen
4.3.1.1 DEFINE A PROCESS
Figure 4-3 Define Process screen
Selecting a process will bring up the Define Process screen as shown in Figure
4-3. In this screen you enter all of the parameters that define a process. A
process consists of a twelve-character name, two levels of passwords and finally a
sequence of layers that makeup the process. Each layer consists of a material and
the desired thickness for the layer. A process can have from 1 to 999 layers as
long as the total number of layers in all the processes is not greater than 999. The
following list describes all of the p
rocess parameters:
eric field)
A CHARACTERS section 4.1.2. Please note that the active
-hand corner of all the status screens.
from editing a
ssword is known. To set this password, move the
d field, type in your password then press the Enter
key. A message will pop up asking for verification to change the password. Press
< Select Process: 01 >Cr
02 Au
03
04
05
1 - Copy process 06
0 - Delete process 07
- View/Edit process 08
↓
Process Name Layer# Thickness Material
>Sample < 001 0.500 Cr
Au
End Layer
007 0.000 End La
Edit 0000 002 1.350
View/Run 0000 003 0.000
004 0.000 End Layer
005 0.000 End Layer
006 0.000 End Layer
yer
Process Name (twelve character alphanum
Each process is referenced by a twelve-character alphanumeric process name.
You enter a process name using the alphanumeric keypad as described in
ENTERING ALPH
process name is displayed in the upper left
Edit Password (four character alphanumeric field)
The Edit process password allows you to lock out other users
process unless the correct pa
cursor onto the Edit passwor