INFICON MDC-360 Thin Film Deposition Controller User Manual
Page 38
MDC-360 DEPOSITION CONTROLLER
4-6
PROGRAMMING AND CONTROLLER SETUP
activate either the drive up or drive down outputs to rotate to the
required pocket in the least amount of time.
c. Motor Driven Inline Source - Select Inline for the Drive type
parameter. Two relay outputs will be created. One called
“
c
t
p
d. Uni
c Drive - Select Sngl Step or Dbl Step for the
D
D
p
l
p
.
W
i
otator one position.
ller
rameter selects between the
a. Individual - With individual format, one output will be created
n
he
d pocket, all outputs will be false. If pocket four is the
t three
Pos
eed
t
sou
followi
No
Ind
his feedback type, one input is created for each pocket
is in
ound). For example, a
n
Individual position feedback is the most typical feedback type and is
recommended if more than one type is available.
SourceN Drive Up” and one called “SourceN Drive Dn”. In this
ase the up output will be activated when going from the greates
ocket to pocket #1.
directional Pneumati
rive parameter. A relay output will be created called “SourceN
rive Up” that should be connected between the rotator’s
neumatic valve and power supply. With Sngl Step, the output wil
ulse once for one second to increment the rotator one position
ith Dbl Step, the output will pulse twice for one second each to
ncrement the r
Indirect Control of Pocket Position - Indirect control means that the MDC-
360 will indicate the desired pocket position to a pocket rotator contro
through position select outputs. The Drive pa
two following indirect position output formats:
for each pocket. So, if pocket 2 is the desired pocket, then the
output “SourceN Pocket 2” will be true while all the other positio
outputs will be false.
b. BCD - With BCD format , the MDC-360 will create from one
to three outputs based on the number of pockets. For example, an
eight pocket source would use three outputs. If pocket one is t
desire
desired pocket, outputs one and two will be true and outpu
will be false.
ition F
back - The last step in defining automatic control of a multi-pocke
rce is to select the pocket position feedback type. The MDC-360 has the
ng five types of position feedback available:
Feedback - As the name implies, no position feedback is created for this
type.
ividual - For t
position in the source. The inputs are labeled “SourceN Pocket X”. All
inputs are normally false (open circuit) unless the respective pocket
position then that input should be true (closed to gr
six pocket source would use six inputs. If pocket two was in position the
all the inputs should be false except the input connected to “SourceN
Pocket 2”.