INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 81)

MDC-360 DEPOSITION CONTROLLER
5-7 OPERATING THE MDC-360
5.7 MODES
Modes are conditions which the controller can occupy. Some modes are indicated
by the LED’s behind the operating keys. Other modes are displayed in the top
right hand corner of the status display (Refer to Figu
re 5-3). These controller
modes are described below.
press. The yellow LED behind the Reset key, when illuminated,
indicates that the controller is in Process Ready Mode.
he
of all of the numeric LED displays. In Abort Mode all displays and
operating keys, with the exception of the Start and Reset keys, are inoperative.
to zero, the Abort relay is closed and all
d
f the Parameter/Status display. Exit from Abort Mode requires
either a Reset or Start key press. See also Section 5.4 for resuming an aborted
hich causes an abort.
In Halt all I/O is frozen. If power is above Soak level, it is ramped down to Soak
at or below the Soak level it is held
t
for
conditions which cause the process to halt.
r is
e is established using the last power level. Sampling mode is set
by two material parameters, Sample Dwell % and Sample Period. Refer to
.3.2.1 scription of Sample Mode.
This mode indicates that the selected process has run to completion. A Process
e mess e top right hand corner of the status display.
e
5.7.1 PROCESS READY
The Process Ready Mode indicates the MDC-360 has been reset and is awaiting a
Start key
5.7.2 ABORT
The Abort mode is indicated by a red LED behind the Abort key as well as t
flashing
All source control outputs are forced
discrete outputs are forced to open circuit. In addition, if the controller initiate
the abort then the condition which caused the abort will be displayed in the top
right hand corner o
process. Refer to Table 5-1 for condition w
5.7.3 HALT (SOFT ABORT)
at the Predeposit ramp rate. If Power is
constant. The user has the option to resume from Halt or press Reset and star
over. See also Section 5.4 for resuming a halted process. Refer to Table 5-1
5.7.4 IN PROCESS
The green LED behind the Start key, when illuminated, indicates the controlle
in the In-Process Mode.
5.7.5 NOT SAMPLING
This mode indicates that the sensor crystal is shuttered from the source and that
the deposition rat
Section 4 # 44 and # 45 for a de
5.7.6 PROCESS COMPLETE
Complet age is displayed in th
In addition, an attention warning will sound. The controller remains in this mod
until a reset signal puts it into the Process Ready mode.