INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 13)

MDC-360 DEPOSITION CONTROLLER
1.3 SPECIFICATIONS
1.3.1 MEASUREMENT
Frequency Resolution 0.03 Hz @6.0 MHz
Mass Resolution 0.375 ng/cm
2
Thickness Accuracy 0.5% + 1 count
Measurement Update Rate Dynamically adjusted, 0.5 to 10 Hz
Display Update Rate 10 Hz
Sensor Crystal Frequency 2.5, 3, 5, 6, 9, 10 MHz
1.3.2 DISPLAY
Thickness Display Autoranging: 0.000 to 999.9 KÅ
Rate Display Autoranging: 0.0 to 999 Å/sec
Power Display 0.0 to 99.9%
Time To Go 0 to 9:59:59 H:MM:SS
Crystal Health % 0 to 99%
Layer Number 1 to 999
Graphics Display 256X64 LCD with CCFL
backlighting
1.3.3 COMMUNICATION
RS-232 serial port standard
RS-485 serial port optional
IEEE-488 bus interface optional
1.3.4 PROGRAM STORAGE CAPACITY
Process 99, user definable
Layer 999, user definable
Material 32, user definable
1.3.5 PROCESS PARAMETERS
Process Name 12 character string
Edit password 4 character string
Run/View password 4 character string
Layer# 1 to 999 Material name, Thickness
1.3.6 MATERIAL PARAMETERS
Material Name 10 character string
GENERAL DESCRIPTION 1-3