INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 83)

MDC-360 DEPOSITION CONTROLLER
5-9 OPERATING THE MDC-360
Alert Action Alert *
Xtal Fail Switch Attention Crystal
Switch
Xtal Mrgn Switch Attention Crystal
Switch
Rate Dev. Atten Attention *
Max power Attention *
Min power Attention *
Change source # X to (material name)
and press Start to continue. Attention Hold
Change sensor # X to crystal # X
and press Start to continue. Attention Hold
Attention Action Attention *
Press Start to resume process. N/A
Start to continue. Attention * Hold
Table 5-1 Trouble Conditions and Warnings
5.9.1 DESCRIPTION
Each of the messages is described below.
5.9.1.1 MIN RATE&MAX POWER
This message indicates that the output power is at the maximum power level set
by the Maximum Power parameter and the rate deviation is below the limit value
set in the Rate Dev. Alarm parameter. When this happens, the controller will go
into the Abort mode and the Alarm will sound.
5.9.1.2 MAX RATE&MIN POWER
This message indicates that the output power is at the minimum power level set
by the Minimum Power parameter, and the rate deviation is above the limit value
SS MEMORY CORRUPTED
set by the Rate Dev. Abort parameter. When this happens, the controller will go
in Abort mode and the Alarm warning will sound.
5.9.1.3 SYSTEM SETUP MEMORY CORRUPTED
The integrity of the System Setup Memory has changed since the last time a
system parameter was modified. Each one of the sub menus and its parameters
has to be checked and corrected as necessary to fix this problem.
5.9.1.4 PROCE
The integrity of the selected process has been changed since last time the process
was modified. Each one of the process parameters has to be checked and
corrected as necessary to fix this problem.