INFICON MDC-360 Thin Film Deposition Controller User Manual
Page 64

MDC-360 DEPOSITION CONTROLLER
4-32
Action Name: > <
Conditions :
Valid operators: 1=!, 2=(, 3=), 4=&, 5=|
PROGRAMMING AND CONTROLLER SETUP
In this screen you select the predefined action you would like to take and the
associated condit
0= Add condition, to save
ions. To specify an action, move the markers onto the action
name field and press the Right-arrow key. This will present the Select Defined
Action screen.
Select Defined Action: 01 >No Action <
02 Manual Power
03 Zero Thickness
his screen you can select a predefined action from the list by moving the
sors onto the desired action and pressing Enter. The following is a list of the
defined actions:
Action - No action is taken. The default setting.
nual - Functionally identical to press
04
Reset
Controller
05
Abort
Process
06
Halt
Process
07
TerminateDeposit
to select
08 Hold In State
↓
In t
cur
pre
No
Ma
ing Manual key.
Res
Ab
ickness for the deposit state. Action is
ign
Ho
Ste
Zero - Functionally identical to pressing Zero key.
et - Functionally identical to pressing Reset key.
ort - Functionally identical to pressing Abort key.
Halt - Halts the process, sets active source power to idle, and leaves all other
source powers unchanged.
Terminate Deposit - Triggers the final th
ored if state is not a deposit state.
ld In State - Holds controller in current state.
p From State - Steps controller to next state.