INFICON MDC-360 Thin Film Deposition Controller User Manual
Page 62
MDC-360 DEPOSITION CONTROLLER
4-30 PROGRAMMING AND CONTROLLER SETUP
Ramp To Idle
Layer Complete
Process Complete
r
ess Resume
ontroller Events are:
Halt
Hold
Time Power
Ready
In Process
Simulate
Time Setpoint
Last Layer
P oc
Events - Event conditions are evaluated true whenever the respective event is
true. C
Abort
Crystal Failure
Crystal Marginal
Min Rate&Max Pwr
Max Rate&Min Pwr
Rate Dev. Alarm
Rate Est. Error
Source Fault
Sensor Fault
Rate Dev. Alert
Max. Power Alert
Min Power Alert
Rate Dev. Atten.
Max Power Atten.
Min Power Atten.
Inputs - Input conditions are represented by the user defined programmable
inputs. A condition is either true or false depending on the state of the input.
Inputs are considered true when pulled to logic ground.
- TGF10 Tracer Gas Filler (36 pages)
- Sensistor ILS500 F Leak Detection Filler (90 pages)
- T-Guard Leak Detection Sensor (85 pages)
- T-Guard Leak Detection Sensor Interface description (40 pages)
- Sensistor ISH2000P Hydrogen Leak Detector, Panel Model (51 pages)
- Sensistor ISH2000 HySpeed Hydrogen Leak Detector (54 pages)
- LDS3000 Modular Leak Detector (52 pages)
- LDS3000 Modular Leak Detector Interface description (56 pages)
- BM1000 Bus module (14 pages)
- I/O1000 I/O module (18 pages)
- CU1000 Control unit (24 pages)
- Helium Leak Detector Modul1000 (130 pages)
- Helium Leak Detector Modul1000 Interface description (40 pages)
- UL5000 Dry Helium Leak Detector (108 pages)
- UL5000 Dry Helium Leak Detector Interface description (14 pages)
- UL1000 Fab Dry Helium Leak Detector (119 pages)
- HLD6000 Refrigerant Leak Detector (76 pages)
- HLD6000 Refrigerant Leak Detector Interface Description (40 pages)
- IO1000 I/O module (18 pages)
- Ecotec E3000 Multigas-Sniffer-Leak Detector (92 pages)
- Ecotec E3000 Multigas-Sniffer-Leak Detector Interface description (36 pages)
- Sensistor XRS9012 Hydrogen Leak Detector User Manual (28 pages)
- Sensistor XRS9012 Hydrogen Leak Detector Maintenance manual (14 pages)
- Extrima Ex-certified Hydrogen Leak Detector (62 pages)
- Sensistor ILS500 Leak Detection System (107 pages)
- Sensistor ISH2000 Hydrogen Leak Detector (58 pages)
- Sensistor ISH2000 Hydrogen Leak Detector (108 pages)
- Sensistor Sentrac Hydrogen Leak Detector (86 pages)
- Protec P3000(XL) Helium Leak Detector (132 pages)
- Pilot Plus Vacuum Gauge (2 pages)
- CO Check Carbon Monoxide Meter (2 pages)
- GAS-Mate Combustible Gas Leak Detector (12 pages)
- Whisper Ultrasonic Leak Detector (8 pages)
- Vortex AC Refrigerant Recovery Machine 115V (20 pages)
- Vortex AC Refrigerant Recovery Machine 230V (16 pages)
- Wey-TEK Refrigerant Charging Scale & Optional Charging Module (2 pages)
- Wey-TEK Refrigerant Charging Scale & Optional Charging Module (44 pages)
- D-TEK CO2 Refrigerant Leak Detector (12 pages)
- TEK-Mate Refrigerant Leak Detector (12 pages)
- Compass Refrigerant Leak Detector (12 pages)
- D-TEK Select Refrigerant Leak Detector (12 pages)
- Explorer Portable Gas Chromatograph (369 pages)
- MicroFID II Portable Flame Ionization Detector (89 pages)
- DataFID Portable Flame Ionization Detector for Landfill Emissions Monitoring (91 pages)
- Hydrostik Hydrogen Fuel Cylinder Installation (7 pages)