INFICON MDC-360 Thin Film Deposition Controller User Manual
Page 136
MDC-360 DEPOSITION CONTROLLER
11-8
COMPUTER INTERFACE
Deposition Rate #2
2
49
1
0-9999
0.1 Å/sec
Deposition Rate #3
2
51
1
0-9999
0.1 Å/sec
Deposition Rate #4
2
53
1
0-9999
0.1 Å/sec
Deposition Rate #5
2
55
1
0-9999
0.1 Å/sec
Time Setpoint
2
57
*
0-35999
Seconds
Ramp to Feed Time
2
59
*
0-35999
Seconds
Feed Power
2
61
1
0-999
0.1%
Feed Time
2
63
*
0-35999
Seconds
Ramp to Idle Time
2
65
*
0-35999
Seconds
Idle Power
2
67
1
0-999
0.1%
Maximum Power
2
69
1
0-999
0.1%
Minimum Power
2
71
1
0-999
0.1%
Rate Deviation
2
Attenti
73
1
0-999 0.1%
on
Rate Deviation Alarm
2
75
1
0-999
0.1%
Rate Deviation Abort
2
77
1
0-999
0.1%
Sample Period
2
79
*
0-35999
Seconds
Backup Tooling Factor
2
81
1
100-4999
0.1%
Ramp Start Thick. #1
3
83
3
0-999900
Å
Ramp Stop Thick #1
3
86
3
0-999900
Å
Ramp Start Thick. #2
3
89
3
0-999900
Å
Ramp Stop Thick #2
3
92
3
0-999900
Å
Ramp Start Thick. #3
3
95
3
0-999900
Å
Ramp Stop Thick #3
3
98
3
0-999900
Å
Ramp Start Thick. #4
3
101
3
0-999900
Å
Ramp Stop Thick #4
3
104
3
0-999900
Å
Mat
4
erial password
107
*
N/A
ASCII
Total 111 bytes
* - Indicates decimal point position is not applicable.
: Header, Address, Instruction=6,
gth=1, Mater
ruct the controller to send the parameter l
terial #15 the
ould send:
255)+Chr$(254)+Chr$
r$(1)+
(15)+Chr$(233)
#
ey
cter material
names.
Format
Len
ial #(0-31), Checksum.
Example: To inst
ist for ma
computer w
Chr$(
(1)+Chr$(6)+Ch
Chr$
8. Receive a material (Code #7)
Instructs the controller to enter all the incoming material parameters for material
n into memory. The parameters must be in the same order and format as the
above material parameter list.
Format: Header, Address, Instruction=7, Length=111, 1 byte, Material# (0-
31),110 bytes parameter data, Checksum.
9. Send material list (Code #8)
Instructs the controller to send a list of all material names in the order that th
are stored in the controller. The material list consists of 32 10 chara