INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 52)

MDC-360 DEPOSITION CONTROLLER
4-20 PROGRAMMING AND CONTROLLER SETUP
power before the source shutter is opened. In the rate establish state the crystal
d, and the controller is controlling
te within the Rate Establish Error%
annot be held within
ller will display a Rate
ted somewhere in
e the source shutter is closed. The default
rr% (0 to 99%)
he rate establish error, which must not
Å/sec)
to 9999.)
sed as thickness setpoints for triggering
osit Rate #2 (0.0 to 999.9 Å/sec)
rate.
00 to 999.9)
ess for rate ramp #2.
999.)
ction.
9)
shutter is opened, the source shutter is close
source power to achieve the programmed ra
for a period of 5 seconds. Once the rate has been held within limit for 5 seconds,
the controller will go into the deposit state. If the rate error c
the allowed percentage error for 5 seconds, then the contro
Establish Error and the process will be halted.
k, the sensor must be loca For the rate establish function to wor
the vapor stream of the source whil
setting for this parameter is 0 which disables this function.
19. Rate Establish E
This parameter sets a maximum limit for t
be exceeded for a five-second period during the rate establish state, in order for
the controller to enter the deposit state.
20. Deposit Rate #1 (0.0 to 999.9
This parameter defines the first deposition rate.
21. Ramp Start Thk #1 (0.000
This parameter determines the thickness value to trigger the start of the first rate
ramp. A value of 999.9 will disable the rate ramp function. Please note that all the
Ramp Start Thk parameters can also be u
I/O events.
22. Ramp Stop Thk #1 (0.000 to 999.9)
This parameter defines the ending thickness for rate ramp #1.
23. Dep
This parameter defines the second
24. Ramp Start Thk #2 (0.000 to 9999.)
This parameter determines the thickness value to trigger the start of the second
rate ramp. A value of 999.9 will disable the rate ramp function.
25. Ramp Stop Thk #2 (0.0
This parameter defines the ending thickn
26. Deposit Rate #3 (0.0 to 999.9 Å/sec)
This parameter defines the third deposition rate.
27. Ramp Start Thk #3 (0.000 to 9
This parameter determines the thickness value to trigger the start of the third rate
ramp. A value of 999.9 will disable the rate ramp fun
28. Ramp Stop Thk #3 (0.000 to 999.
This parameter defines the ending thickness for rate ramp #3.
29. Deposit Rate #4 (0.0 to 999.9 Å/sec)