INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 139)

MDC-360 DEPOSITION CONTROLLER
11-11 COMPUTER INTERFACE
Example: To instruct the controller to send the process layer parameters for
)+Chr$(0)+C
ing layer parameters of process # n in
process #15 layer #5 the computer would send:
Chr$(255)+Chr$(254)+Chr$(1)+Chr$(13)+Chr$(3)+Chr$(15
hr$(5)+ Chr$(219)
15. Insert process layer (Code #14)
Instructs the controller to insert the incom
front of layer # y adding the layer to the process. A description of the insert
process layer parameter list is as follows:
Parameter Name Length (bytes) Decimal Pt.
Position
Range Units
Process # 1 * (0-98) None
Layer # 2 * (0-998) None
Layer # n Thickness 3 (0-999900) Å 3
Layer # n Material # 1 (0-31) None *
Total 7 byte s
If all of the layers are defined then the espond with and
insufficient layer space error.
16. Replace process layer (Code #15
Instructs the controller to enter the inco parameters into
process # n layer # y. A description of ameter list is given
above.
Writing a layer to an undefined process To define a process
use the Receive Process instruction.
17. Delete process layer (Code #16)
Instructs the controller to delete later #
Format: Header, Address, Instruction= Process #(0-98), 2
byte Layer #(0-998), Checksum.
18. Send process list (Code #17)
Instructs the controller to send all proce
in the controller. The process list consists of 99 12 character process names.
Example: To instruct the controller to send the process list the computer would
send:
r$(254)+ r$(1) 8)
message length is lim ill send
s in five separ mess ill each
contain 20 names and the last message
19. Send source setup (Code #18)
Instructs the controller to send the sour rces. A
description of the source parameter list
controller will r
)
ming process layer
the process layer par
results in an error.
y from process # n.
16, Length=3, 1 byte
ss names in the order that they are stored
Chr$(255)+Ch Ch +Chr$(17)+Chr$(0)+Chr$(23
Since the MDC’s
the process name ited to 249 bytes, the controller w
ate ages. The first four messages w
will contain 19 names.
ce setup parameter list for all sou
is as follows: