INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 82)

MDC-360 DEPOSITION CONTROLLER
5-8 OPERATING THE MDC-360
5.7.7 MANUAL
This mode is indicated by the red LED behind the Manual key. In this mode the
control voltage output is controlled through the Remote Power Handset. For a
fer to Section 3.5.
ness build-up by simulating the sensor input
rather than the actual sensor. Refer to Section 3.4 for more information on the
tates that make up a complete deposition cycle,
such as Rise to Soak, Rise to Predeposit, etc. The controller moves from state to
ND WARNING MESSAGES
Troubles are controller conditions which in most case are indicative of problems
e messages are displayed in the top right
there are three levels of audible warnings associated with the trouble
conditions, Attention, Alert and Alarm. Table 5-1 lists the messages and warning
order of priority. In the event that more
lumn indicates the warning sound will clear when the condition
clears. Any key press will also clear the sound. The action column indicates
trouble.
detailed description of this mode, re
5.7.8 SIMULATE
This mode simulates rate and thick
Simulate Mode.
5.8 STATES
Figure 5-11 shows the different s
state as the deposition progresses.
5.9 TROUBLE, ERROR A
or errors, but may be just warnings. Thes
hand corner of the status screen (See Figure 5-3).
In addition,
levels. The list is arranged in descending
than one warning level is triggered, the higher level has priority. An asterisk in
the Clear co
what if any action is taken as a result of the
Warning
Messages Type Clear Action
Min Rate&Max Power Alarm Abort
Max Rate&Min Power Alarm Abort
System Setup memory corrupted Alarm Halt
Process memory corrupted Alarm Halt
Material memory corrupted Alarm Halt
Rate Est. Error Alarm Halt
Crystal Failure Alarm/Attn NO/* Halt
Source Fault Alarm Halt
Sensor Fault Alarm Halt
Time Power Alarm Time/Power
Rate Dev. Alarm Alarm *
Alarm Action Alarm
Crystal Marginal Alert/Attn NO/*
Rate Dev. Alert Alert *
Max power Alert Alert *
Min power Alert Alert *