INFICON MDC-360 Thin Film Deposition Controller User Manual
Page 70
MDC-360 DEPOSITION CONTROLLER
4-38 PROGRAMMING AND CONTROLLER SETUP
BCD
- Binary Coded Decimal position feedback. This feedback type
uses binary coding to indicate the pocket position. Inputs are numbered most
significant bit first. For example, an eight pocket source would use three
ts would be false. With pocket
true and input three would be
NO FEEDBACK - No pocket position feedback is used.
Table of Input states for BCD feedback type.
Pocket
Number
Input
BCD2
Input
BCD1
Input
BCD0
inputs. With pocket one in position, all inpu
four in position, inputs one and two would be
false.
SNGL HOME - Single home position feedback. This feedback type uses one
input. The input is normally false (open circuit) and should go true (closed to
ground) when pocket one is in position.
IN POSITION - In position feedback. This feedback type uses one input.
The input is normally false (open circuit) and should go true (closed to
ground) when the desired pocket is in position.
1 OPEN
OPEN
OPEN
2 OPEN
OPEN
GND
3 OPEN
GND
OPEN
4 OPEN
GND
GND
5 GND
OPEN
OPEN
6 GND
OPEN
GND
7 GND
GND
OPEN
8 GND
GND
GND
7. Rotator Delay (0 to 99 seconds)
This parameter serves two different functions. If the feedback type is “None”
(Not recommended. See cautions in the Installation section.) this parameter tells
the controller how long to wait, on the assumption the pocket will get into
position. If position feedback is provided, this parameter tells the controller how
long it should wait for the pocket to reach its target position before it issues a
Source Fault message.
8. Source Voltage (2.5V, 5.0V, 10V)
This parameter sets the upper voltage range for the source control output. The
lower voltage range is always 0. For example, selecting 10 for this parameter sets
the source control voltage range from 0 to 10 volts.