INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 56)

MDC-360 DEPOSITION CONTROLLER
4-24 PROGRAMMING AND CONTROLLER SETUP
1. Pause On Layer Complete (Yes or No)
This parameter determines whether the controller will pause between layers. If
his parameter is set to Yes then the controller will stop on layer complete and t
wait for a Start key press from the operator. If this parameter is set to No then the
controller will automatically increment to the next layer.
2. Thk Graph Scale (2-digit, 3-digit)
This parameter defines whether the rightmost 2 or 3 digits of thickness will be
graphed.
3. Time To Go Display (Estimated state, layer time or Elapsed process, la
ate time)
yer or
ont
r
s
8. Source/Sensor Status (Enabled, Disabled)
This parameter defines whether the source/sensor status screen is enabled as one
Status (Enabled, Disabled)
arameter defines whether the I/O status screen is enabled
screens.
if all six status screens are disabled, the Rate Vs. Time G
yed when the Status key is pressed.
can
be associated arbitrarily by the user with the logical inputs using the Edit Program
st
This parameter defines the displayed value of the Time To Go display on the fr
panel. The choices are estimated state or layer time, or the elapsed process, laye
or state time.
4. Thickness Vs. Time Graph (Enabled, Disabled)
This parameter defines whether the thickness verses time graph is enabled as one
of the status screens.
5. Rate Vs. Time Graph (Enabled, Disabled)
This parameter defines whether the rate verses time graph is enabled as one of the
status screens.
6. Rate Dev. Vs. Time Graph (Enabled, Disabled)
This parameter defines whether the rate deviation verses time graph is enabled a
one of the status screens.
7. Power Vs. Time Graph (Enabled, Disabled)
This parameter defines whether the power verses time graph is enabled as one of
the status screens.
of the status screens.
9. I/O
This p as one of the
status
Note, raph will be
displa
4.3.3.2 PROGRAM INPUTS
The controller has ‘logical’ discrete inputs which are used when running a
process, and ‘physical’ discrete inputs at the rear-panel connector pins which