INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 37)

MDC-360 DEPOSITION CONTROLLER
4-5 PROGRAMMING AND CONTROLLER SETUP
If th
.
The set
source
manual
Sin
Mu
multiple pocket source, you need only set the Number
Mu
of p
sec
is s
par
ime allowed for the correct
the rot
The se
pocke
osition control and
Positi t
positio
interfa
Direct eans that the MDC-
tc.)
ol first
se
dr
a. Un rive - The rotator drive motor can only turn in
b. Bi-
type, the MDC-360 will
e shutter actuator has a significant delay in opening and closing then set
the Shutter Delay parameter equal to the delay
Source Voltage - This parameter must be set to correspond to the input
voltage range of the source power supply (0 to 2.5, 5.0 or 10.0 volts).
tings of the rest of the source parameters are dependent on whether the
has one or more pockets (crucibles) and whether pocket selection is
or automatic.
gle Pocket Source - If the source has only one pocket (single pocket E-
beam gun, filament boat or sputtering source) then the remaining
parameters can be left at their default values.
ltiple Pocket Source with Manual Position Control - For manual
position control of a
of Pockets parameter to the correct number of pockets. Once set, a
message will appear at the start of each layer instructing the operator to
change source N to the required material.
ltiple Pocket Source with Automatic Position Control - There are two
parameters requiring definition which are common to all the various types
osition control. The first is the Number of Pockets parameter and the
ond is the Rotator Delay parameter. The Number of Pockets parameter
imply the number of pockets in the source. The Rotator Delay
ameter defines the maximum amount of t
pocket to rotate into position. This should be set to the time it takes for
ator to go from pocket #1 all the way around to pocket #1 again.
ttings of the three remaining parameters required for automatic
t position control depend on the required type of p
position feedback.
on Control - The MDC-360 can be setup to either control the pocke
n directly by interfacing to the rotator’s actuator or indirectly by
cing to a rotator controller.
Control of Pocket Position - Direct control m
360 will control the actuator (rotator motor, pneumatic valve, e
directly to get the desired pocket into position. For direct contr
t the Control Parameter to Direct then select one of the following
ive types and follow the instructions:
idirectional Motor D
one direction. Select Up for the Drive parameter. A relay output
will be created called “SourceN Drive Up” that should be connected
between the rotator motor and power supply.
directional Motor Drive - The rotator motor can turn in either
direction. Select Fast for the Drive parameter. Two relay outputs
will be created. One called “SourceN Drive Up” and one called
“SourceN Drive Dn”. With this drive