INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 6)

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5.4 RESUMING AN ABORTED OR HALTED PROCESS................................................ 5-2
5.5 STATUS DISPLAYS ..................................................................................................... 5-3
5.6 VIEWING RESULTS..................................................................................................... 5-4
5.7 MODES .......................................................................................................................... 5-7
5.7.1 PROCESS READY...................................................................................................... 5-7
5.7.2 ABORT ....................................................................................................................... 5-7
5.7.3 HALT (SOFT ABORT) ............................................................................................... 5-7
5.7.4 IN PROCESS .............................................................................................................. 5-7
5.7.5 NOT SAMPLING........................................................................................................ 5-7
5.7.6 PROCESS COMPLETE ............................................................................................. 5-7
5.7.7 MANUAL.................................................................................................................... 5-8
5.7.8 SIMULATE................................................................................................................. 5-8
5.8 STATES.......................................................................................................................... 5-8
5.9 TROUBLE, ERROR AND WARNING MESSAGES ................................................... 5-8
5.9.1 DESCRIPTION .......................................................................................................... 5-9
5.9.1.1 MIN RATE&MAX POWER.......................................................................................... 5-9
5.9.1.2 MAX RATE&MIN POWER.......................................................................................... 5-9
5.9.1.3 SYSTEM SETUP MEMORY CORRUPTED................................................................ 5-9
5.9.1.4 PROCESS MEMORY CORRUPTED ........................................................................... 5-9
5.9.1.5 MATERIAL MEMORY CORRUPTED ...................................................................... 5-10
5.9.1.6 RATE EST. ERROR .................................................................................................... 5-10
5.9.1.7 CRYSTAL FAILURE .................................................................................................. 5-10
5.9.1.8 SOURCE FAULT ........................................................................................................ 5-10
5.9.1.9 SENSOR FAULT......................................................................................................... 5-10
5.9.1.10 TIME POWER ............................................................................................................. 5-10
5.9.1.11 RATE DEV. ALARM .................................................................................................. 5-10
5.9.1.12 ALARM ACTION ....................................................................................................... 5-10
5.9.1.13 CRYSTAL MARGINAL ............................................................................................. 5-10
5.9.1.14 RATE DEV. ALERT ................................................................................................... 5-11
5.9.1.15 MAX POWER ALERT................................................................................................ 5-11
5.9.1.16 MIN POWER ALERT ................................................................................................. 5-11
5.9.1.17 ALERT ACTION ......................................................................................................... 5-11
5.9.1.18 XTAL FAIL SWITCH ................................................................................................. 5-11
5.9.1.19 XTAL MRGN SWITCH .............................................................................................. 5-11
5.9.1.20 RATE DEV. ATTEN ................................................................................................... 5-11
5.9.1.21 MAXIMUM POWER .................................................................................................. 5-11
5.9.1.22 MINIMUM POWER .................................................................................................... 5-11
5.9.1.23 CHANGE POCKET..................................................................................................... 5-11
5.9.1.24 CHANGE CRYSTAL... ............................................................................................... 5-12
5.9.1.25 ATTENTION ACTION ............................................................................................... 5-12
6. TUNING THE MDC-360 CONTROL LOOP................................................................. 6-1
6.1 C ONTROL L OOP B ASICS ................................................................................................... 6-1
6.2 C ONTROL L OOPS A PPLIED TO V ACUUM D EPOSITION ....................................................... 6-2
6.3 E STABLISHING MDC-360 C ONTROL L OOP P ARAMETERS ................................................ 6-3
7. INPUT/OUTPUT CHARACTERISTICS........................................................................ 7-1
7.1 SOURCE CONTROL VOLTAGE OUTPUT................................................................. 7-1
7.2 SENSOR INPUT ............................................................................................................ 7-1
7.3 DISCRETE OUTPUTS................................................................................................... 7-1
7.4 DISCRETE INPUTS....................................................................................................... 7-1
7.5 DIGITAL-TO-ANALOG CONVERTER OUTPUTS .................................................... 7-2
7.6 DIGITAL-TO-ANALOG CONVERTER CONTROL INPUTS .................................... 7-2
8. CONTROLLER INSTALLATION ................................................................................. 8-1
8.1 MOUNTING................................................................................................................... 8-1
8.2 PROPER GROUNDING ................................................................................................ 8-1
8.3 EXTERNAL CONNECTIONS ...................................................................................... 8-1
8.3.1 POWER ...................................................................................................................... 8-1