INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 36)

MDC-360 DEPOSITION CONTROLLER
4-4 PROGRAMMING AND CONTROLLER SETUP
4.2 GETTING STARTED
at you
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on the crystal. This mode is useful for testing the setup of the MDC-
ources, and sensors for that matter, is that
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at the relay will close to open the shutter.
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ontroller in the Process
This section lays out the basic programming sequence with programming
examples for initial setup of the MDC-360 deposition controller.
4.2.1 UTILITY SETUP
The only critical parameter in the Utility Setup is the Crystal Frequency
parameter. This parameter must be set for the specific frequency crystals th
plan to use (2.5, 3.0, 5.0, 6.0, 9.0, 10.0 MHz).
There is one other parameter in the Utility Setup menu that may be useful in the
initial setup and testing phase of the MDC-360 and that is the Simulate Mode
parameter. The simulate mode of the MDC-360 provides a means of simulatin
deposition
360 without having to deposit any material.
4.2.2 DAC SETUP
If the DAC (digital to analog) outputs are to be used then these parameters can be
set at this time but it is not necessary for the operation of the controller.
4.2.3 SOURCE SETUP
The first item to note is that in defining s
MDC-360 will automatically create the inputs and outputs necessary to
te the interface based on the parameter settings. Therefore, once th
lete, the user should review the inputs and outputs noting the pin
ents so that the proper connections can be made. Also note
assignments can be changed if necessary in the program input and outpu
eens.
er must also be aware of the type of I/O card installed in the MDC-360.
re two types of I/O cards available. Both cards have the same 9 relay
(8 programmable and 1 abort) and the same number of inputs (8
mable). The difference is the stand
ile the Active I/O card has 115VAC high true inputs. The Active I/O card is
ignated by “Active I/O Card“ written on the rear panel of the MDC-360.
following two items in the Source Setup are common to almost all types
rces and typically require definition:
Source Shutter - If the source has a shutter to be activated by the MDC-36
then the Shutter Relay Type parameter must be set to either N.O.
(normally open) or N.C. (normally closed). The typical setting is N.
which means th
Once defined, the MDC-360 will create a relay output called “SourceN
Shutter” that should be connected to the shutter actuator. The shu
be tested by pressing the Shutter key with the c
Ready state. When the red LED in the Shutter key is illuminated then all
source shutters should be opened. When the shutter LED is off then all
source shutters should be closed.