INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 14)

MDC-360 DEPOSITION CONTROLLER
Sensor # 1 to 4
Crystal # 1 to 8
Source # 1 to 4
Pocket # 1 to 8
Material Density 0.80 to 99.9 gm/cm
3
Acoustic Impedance 0.50 to 59.9 gm/cm
2
sec
Tooling Factor 10.0 to 499.9%
Proportional gain 0.00 to 9999
Integral Time constant 0 to 99.9 sec
Derivative Time constant 0 to 99.9 sec
Rise to Soak Time 0 to 9:59:59 H:MM:SS
Soak Power 0 to 99%
Soak Time 0 to 9:59:59
Rise to Predeposit Time 0 to 9:59:59
Predeposit Power 0 to 99.9%
Predeposit Time 0 to 9:59:59
Rate Establish Time 0 to 60 sec
Rate Establish Error 0 to 99.9%
Deposition Rate (1 to 5) 00.0 to 999.9 Å/sec
Rate Ramp Start (1 to 4) 0.000 to 999.9 KÅ
Rate Ramp Stop (1 to 4) 0.000 to 999.9 KÅ
Time Setpoint 0 to 9:59:59
Ramp to Feed Time 0 to 9:59:59
Feed Power 0 to 99.9%
Feed Time 0 to 9:59:59
Ramp to Idle Time 0 to 9:59:59
Idle Power 0 to 99.9%
Maximum Power 0 to 99.9%
Power Alarm Delay 0 to 99 sec
Minimum Power 0 to 99.9%
Rate Deviation Attention 0 to 99.9%
Rate Deviation Alarm 0 to 99.9%
Rate Deviation Abort 0 to 99.9%
Sample Dwell % 0 to 100.0%
Sample Period 0 to 9:59:59
Crystal Fail Switch, Time Power, or Halt
Backup Sensor # 1 to 4
Backup Crystal # 1 to 8
Backup Tooling Factor 0 to 499.9%
Material Password 4 character string
The MDC-360 also has a built in material library that contains many common
material names along with their density and acoustic impedance values.
GENERAL DESCRIPTION 1-4