Ented in table 10-1, Terials is presented in table 10-1 – INFICON MDC-360 Thin Film Deposition Controller User Manual
Page 126
MDC-360 DEPOSITION CONTROLLER
10-6
Table 10-1 Material Density an
ance Value
Material
d Acoustic Imped
Symbol
Density
Impedance
Aluminum Al
2.70
8.17
Aluminum Oxide
Al
2
O
3
3.97 26.28
Antimony Sb
6.62
11.49
Arsenic As
5.73
9.14
Barium Ba
3.5
4.20
Beryllium
1.85
Be
16.26
Bism
Bi
9.8
uth
11.18
Boron B
2.54
22.70
Cadmium Cd
8.64
12.95
Cadmium Sulfide
8.66
CdS
4.83
Cadmium Telluride
1
CdTe
5.85
9.0
Calcium Ca
1.55
3.37
Calcium Fluoride
CaF
3.18 11.39
2
Carbon (Diamond)
40.14
C
3.52
Carbon (Graphite)
2.71
C
2.25
Chromium Cr
28.95
7.20
Cobalt Co
8.71
25.74
Copper Cu
3
20.21
8.9
Copper (I) Su
e (alpha)
12.80
lfid
Cu S 5.6
2
Copper (I) Su
e (beta)
13.18
lfid
Cu S 5.8
2
Copper (II) Sulfide
10.77
CuS
4.6
Dysprosium Dy
14.72
8.54
Erbium Er
11.93
9.05
Europium Eu
----
5.244
Gadolinium Gd
13.18
7.89
Gallium Ga
14.89
5.93
Gallium Arsenide
5.55
GaAs
5.31
Germanium Ge
17.11
5.35
Gold Au
23.18
19.30
Hafnium Hf
24.53
13.09
Holnium Ho
15.2
8.8
Indium In
10.50
7.30
Indium Antimonide
11.48
InSb
5.76
Iridium Ir
68.45
22.40
Iron Fe
25.30
7.86
Lanthanum La
9.59
6.17
Lead Pb
1.30
7.81
1
Lead Sulfide
15.60
PbS
7.50
Lithium Li
0.53
1.50
Lithium Fluoride
11.41
LiF
2.64
Magnesium Mg 48
1.74
5.
Magnesium Fluoride
13.86
MgF
3.0
2
Magnesium Oxide
21.48
MgO
3.58
THEORY OF OPERATION