Viewing results, Viewing results -4, Figure 5-6 power vs. time graph -4 – INFICON MDC-360 Thin Film Deposition Controller User Manual

Page 78: Figure 5-7 source/sensor status screen -4, Figure 5-8 i/o status screen -4

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MDC-360 DEPOSITION CONTROLLER

5-4

Sample Cr Process Ready
5
P
o
w
e
r
% 0 1

Figure 5-6 Power vs. Time Graph

Sample Cr Process Ready

7 1 1 95

2 1 10.0 2 1 99

4 1 99

Source Status Sensor Status
Src# Pckt# Power Snsr# Xtl# Health
1 1 23.

3 1 10.0 3 1 99
4 1 10.0

Figure 5-7 Source/Sensor Status screen

Sample Cr Process Ready
Input State Output State
01>Name F F<
02 F F
03 F F

F F

04
05 F F
06 F F

Figure 5-8 I/O Status Screen

5.6 VIEWING

RESULTS

or can be downloaded to a PC for permanent storage and/or

review.

The MDC-360 has an optional Internal Data Storage capability that provides
internal storage of real time run data. Stored data can later be viewed through th
four status graphs

OPERATING THE MDC-360