INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 40)

MDC-360 DEPOSITION CONTROLLER
4-8 PROGRAMMING AND CONTROLLER SETUP
b. Automatic Crystal Position Control - There are two parameters
requiring definition which are common to all the various types of
multiple sensor heads. The first is the Number of Crystals parameter
and
Cry
The Ro
allowed
set to th
around
The
crystal po
position fe
Pos l the
cry
indirectly
Direct
M
va
ired crystal into position. For
t
a. Un
b. Bi-
utputs will be created. One called
ted
ator’s pneumatic valve and power supply.
Indirect C
360 wi esired crystal position to a crystal rotator controller
through position select outputs. . The Drive parameter selects between the
stal, then the
the second is the Rotator Delay parameter. The Number of
stals parameter defines the number of crystals in the sensor head.
tator Delay parameter defines the maximum amount of time
for the correct crystal to rotate into position. This should be
e time it takes for the rotator to go from crystal #1 all the way
to crystal #1 again.
settings of the three remaining parameters required for automatic
sition control depend on the type of position control and
edback.
ition Control - The MDC-360 can be setup to either contro
stal position directly by interfacing to the rotator’s actuator or
by interfacing to a rotator controller.
Control of Pocket Position - Direct control means that the
DC-360 will control the actuator (rotator motor, pneumatic
lve, etc.) directly to get the des
direct control, set the Control Parameter to Direct then selec
one of the following drive types and follow the instructions:
idirectional Motor Drive - Select Up for the Drive
parameter. A relay output will be created called “SensorN
Drive Up” that should be connected between the rotator
motor and power supply.
directional Motor Drive - Select Fast for the Drive
parameter. Two relay o
“SensorN Drive Up” and one called “SensorN Drive Dn”.
With this drive type, the MDC-360 will activate either the
drive up or drive down outputs to get to the required crystal
in the least amount of time.
d. Unidirectional Pneumatic Drive - Select Sngl Step or Dbl
Step for the Drive parameter. A relay output will be crea
called “SensorN Drive Up” that should be connected
between the rot
With Sngl Step, the output will pulse once for one second to
increment the rotator one position. With Dbl Step, the
output will pulse twice for one second each to increment the
rotator one position.
ontrol of Crystal Position - Indirect control means that the MDC-
ll indicate the d
two following indirect position output formats:
a. Individual - With individual format, one output will be created
for each crystal. So, if crystal 2 is the desired cry