INFICON MDC-360 Thin Film Deposition Controller User Manual
Page 134
MDC-360 DEPOSITION CONTROLLER
11-6
COMPUTER INTERFACE
Parameter Name
Length (bytes)
Range
DAC#1 Output
1
=Rate, 23=RateDev, 24=Pwr, 25=Thk)
(22
DAC#1 Range
1
(26=2 Digit, 27=3 Digit)
DAC#2 Output
1
(22=R
=Pwr, 2
)
ate, 23=RateDev, 24
5=Thk
DAC#2 Range
1
(26=2 Digit, 27=3 Digit)
Thickness Graph Scale
1
(26=2 Digit, 27=3 Digit)
Crystal Frequency
1
(30=2
3.0MHz, 32=5.0m
33=6.0MHz, 34=9.0mhz, 35=10.0MHz)
.5mhz, 31=
hz,
Data Points/min
1
(38=30 ppm, 39=60 ppm, 40=120 ppm,
41=300 ppm, 42=600ppm)
Simulate Mode
1
(20=Off, 21=On)
Interface Address
1
(1-32)
Attention Volume
1
(0-10)
Alert Volume
1
(0-10)
Alarm Volume
1
(0-10)
Pause on layer complt
1
(0=No, 1=Yes)
Time To Go Display
1
(72=E
73=Est. State,
74=Elapsed Process, 75=Elapsed Layer,
76=E
stimated Layer,
lapsed State)
Rate Graph
1
(78=Enabled, 79=Disabled)
Power Graph
1
(78=Enabled, 79=Disabled)
Thickness Graph
1
(78=Enabled, 79=Disabled)
Rate Deviation Graph
1
(78=Enabled, 79=Disabled)
Source/Sensor Status
1
(78=Enabled, 79=Disabled)
I/O Status
1
(78=Enabled, 79=Disabled)
Total 20 bytes
Example: To instruct the controller to send the utility parameters the computer
would send:
Chr$(255)+Chr$(254)+Chr$(1)+Chr$(2)+Chr$(0)+Chr$(253)
4. Rec
coming utility parameters into memory.
puter.
A description of the time and date
eive utility parameters (Code #3)
Instructs the controller to enter all the in
5. Send controller time (Code #4)
Instructs the controller to send the its current time and date to the host com
The time and date are sent as strings.
parameter list is as follows:
Parameter Name
Length (bytes)
Range
Seconds 2
(0-59)
Minutes 2
(0-59)
Hours 2
(1-23)
Day of month
2
(1-28/29/30/31)
Month 2
(1-12)