INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 5)

3.3 SAMPLE PROGRAM.................................................................................................... 3-1
3.3.1 MATERIAL #1 PARAMETERS .................................................................................. 3-2
3.3.2 MATERIAL #2 PARAMETERS .................................................................................. 3-3
3.3.3 PROCESS PARAMETERS ......................................................................................... 3-4
3.4 SIMULATE OPERATION............................................................................................. 3-4
3.5 MANUAL OPERATION ............................................................................................... 3-4
3.6 INSTALLING OPTION BOARDS................................................................................ 3-4
3.6.1 SOURCE-SENSOR BOARD ...................................................................................... 3-5
3.6.2 DISCRETE I/O BOARD............................................................................................. 3-5
3.6.3 IEEE-488 OPTION BOARD ...................................................................................... 3-5
3.7 DIGITAL TO ANALOG CONVERTER (DAC) CHECKOUT..................................... 3-5
4. PROGRAMMING AND CONTROLLER SETUP ........................................................ 4-1
4.1 GENERAL...................................................................................................................... 4-1
4.1.1 NAVIGATING THE MENU STRUCTURE ................................................................ 4-1
4.1.2 ENTERING ALPHA CHARACTERS.......................................................................... 4-2
4.1.3 ENTERING TIME PARAMETERS............................................................................. 4-2
4.1.4 COPYING AND DELETING ..................................................................................... 4-2
4.1.5 PASSWORD PROTECTION ...................................................................................... 4-2
4.1.5.1 VIEW/RUN PROCESS PASSWORD ........................................................................... 4-3
4.1.5.2 EDIT PROCESS PASSWORD ...................................................................................... 4-3
4.1.5.3 EDIT MATERIAL PASSWORD ................................................................................... 4-3
4.1.6 ADJUSTING PARAMETER/STATUS DISPLAY CONTRAST ................................... 4-3
4.2 GETTING STARTED .................................................................................................... 4-4
4.2.1 UTILITY SETUP ........................................................................................................ 4-4
4.2.2 DAC SETUP .............................................................................................................. 4-4
4.2.3 SOURCE SETUP ....................................................................................................... 4-4
4.2.4 SENSOR SETUP ........................................................................................................ 4-7
4.2.4.1 EXAMPLE USING MAXTEK’S RSH-600 SIX CRYSTAL SENSOR HEAD ............ 4-9
4.2.5 INPUT, OUTPUT AND ACTION SETUP.................................................................. 4-9
4.2.6 DISPLAY SETUP ......................................................................................................4-10
4.2.7 MATERIAL SETUP...................................................................................................4-10
4.2.7.1 POWER RAMPS.......................................................................................................... 4-11
4.2.7.2 AUTOMATIC CRYSTAL SWITCHING .................................................................... 4-12
4.2.7.3 RATE ESTABLISH ..................................................................................................... 4-12
4.2.7.4 RATE RAMPS ............................................................................................................. 4-12
4.2.7.5 RATE SAMPLE MODE .............................................................................................. 4-12
4.2.7.6 RATE DEVIATION ALARM...................................................................................... 4-12
4.2.8 PROCESS SETUP.....................................................................................................4-13
4.2.9 STARTING A NEW PROCESS..................................................................................4-13
4.2.10 RESUMING A PROCESS FROM ABORT OR HALT ..........................................4-13
4.3 DETAILED PROGRAMMING ....................................................................................4-13
4.3.1 VIEW/EDIT PROCESS .............................................................................................4-13
4.3.1.1 DEFINE A PROCESS.................................................................................................. 4-14
4.3.2 VIEW/EDIT MATERIAL ...........................................................................................4-16
4.3.2.1 DEFINE A MATERIAL............................................................................................... 4-16
4.3.3 SYSTEM SETUP .......................................................................................................4-23
4.3.3.1 EDIT DISPLAY SETUP .............................................................................................. 4-23
4.3.3.2 PROGRAM INPUTS ................................................................................................... 4-24
4.3.3.3 PROGRAM OUTPUTS................................................................................................ 4-26
4.3.3.4 PROGRAM ACTIONS ................................................................................................ 4-31
4.3.3.5 EDIT SENSOR SETUP................................................................................................ 4-33
4.3.3.6 EDIT SOURCE SETUP ............................................................................................... 4-36
4.3.3.7 EDIT DAC SETUP ...................................................................................................... 4-39
4.3.3.8 EDIT UTILITY SETUP ............................................................................................... 4-39
5. OPERATING THE MDC-360.......................................................................................... 5-1
5.1 SIGN-ON SCREEN........................................................................................................ 5-1
5.2 STARTING A NEW PROCESS .................................................................................... 5-1
5.3 STARTING A NEW LAYER ........................................................................................ 5-2
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