INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 49)

MDC-360 DEPOSITION CONTROLLER
4-17
Figure 4-6 Define Material screen
Sensor 1
Crystal 1
Source 1
Pocket 1
Density 07.20 gm/cm^3
Acoustic Impedance 28.95 gm/cm^2/sec
Material Name: >Cr <
Tooling Factor 070 0 %
↓
1. Material Name (A ten character material name)
The material name parameter allows you to either use the keypad to type in a
name, or pick a name from the materials already stored in the material library.
a material from the material library, move the cursor to the material
ght-arrow key. This will display a complete list of
To pick a material, move the cursor
on ess Enter key. Once a material is chosen, the stored
or that material are automatically
eters.
e
y crystal used to monitor this material. This
umber of Crystals parameter in the Sensor
This parameter defines the pocket number that contains this material. This
parameter cannot be greater than the Number Of Pockets parameter in the Source
Setup screen. The default setting is 1.
6. Density (0.80 to 99.99 gm/cm
3
)
ameter provides the material density so that the controller can calculate
. If the film density is known it should be
To pick
parameter and press the Ri
materials that are stored in the MDC-360.
to that material and pr
values for the density and acoustic impedance f
entered into their respective param
2. Sensor# (1 to 4)
This parameter defines the sensor input number that will be used for this material,
and cannot be greater than the number of sensor inputs fitted to the controller. Th
default setting is 1.
3. Crystal# (1 to 8)
This parameter defines the primar
parameter cannot be greater than the N
Setup screen. . The default setting is 1.
4. Source# (1 to 4)
This parameter defines the source output number that will be used for this
material, and cannot be greater than the number of source outputs fitted to the
controller. The default setting is 1.
5. Pocket# (1 to 8)
This par
and display the physical film thickness
PROGRAMMING AND CONTROLLER SETUP