INFICON MDC-360 Thin Film Deposition Controller User Manual
Page 138
MDC-360 DEPOSITION CONTROLLER
11-10 COMPUTER INTERFACE
The message number is included as a safeguard to insure that the all messages
received and are in order.
Example: T
are
o instruct the controller to send the process parameters for process
$(229)
o enter the
ters of
escription of the process para eter list is as f
#15 the computer would send:
Chr$(255)+Chr$(254)+Chr$(1)+Chr$(10)+Chr$(1)+Chr$(15)+Chr
12. Receive process (Code #11)
Instr
memory.
ucts the controller t
incoming parame
proc
ollows:
ess # n into
A d
m
Parameter Name
Length (bytes)
Decimal Pt.
Position
Range
Units
Process #
1
*
(0-98)
None
Process Name
12
*
Character
None
Edit Password
4
*
Character
None
View/Run Password
4
*
Character
None
Total 21 bytes
Format: Header, Address, Instruction=11, Length=21, 1 byte process#(0-98), 12
e(ASCII), 4 byte Edit Password, 4 byte View/Run Password,
ess layers you must use the insert, replace, and delete process
cess (Code #12)
oller to delete process# n and its associated layers.
ruct the controller to delete process# 15 the computer would
55)+Chr$(254)+Chr$(1)+Chr$
+Chr$(1)+Chr$(15)+Chr$(227)
s layer (Code #13)
roller to send the process lay
arameters for process # n layer #
the p
r parameter list is as
byte Process nam
Checksum.
To modify proc
layer instructions.
13. Delete pro
Instructs the contr
inst
Example: To
send:
Chr$(2
(12)
14. Send proces
Instructs the cont
er p
y to the host computer. A description of
rocess laye
follows:
Parameter Name
Length (bytes)
Decimal Pt.
Position
Range
Units
Process #
1
*
(0-98)
None
Layer #
2
*
(0-998)
None
Layer # n Thickness
3
3
(0-999900) Å
Layer # n Material #
1
*
(0-31)
None
Total 7 bytes
Format: Header, Address, Instruction=13, Length=3, 1 byte Process #, 2 byte
Layer #, Checksum.