beautypg.com

INFICON MDC-360 Thin Film Deposition Controller User Manual

Page 138

background image

MDC-360 DEPOSITION CONTROLLER

11-10 COMPUTER INTERFACE

The message number is included as a safeguard to insure that the all messages
received and are in order.

Example: T

are

o instruct the controller to send the process parameters for process

$(229)

o enter the

ters of

escription of the process para eter list is as f

#15 the computer would send:

Chr$(255)+Chr$(254)+Chr$(1)+Chr$(10)+Chr$(1)+Chr$(15)+Chr

12. Receive process (Code #11)

Instr
memory.

ucts the controller t

incoming parame

proc

ollows:

ess # n into

A d

m

Parameter Name

Length (bytes)

Decimal Pt.

Position

Range

Units

Process #

1

*

(0-98)

None

Process Name

12

*

Character

None

Edit Password

4

*

Character

None

View/Run Password

4

*

Character

None

Total 21 bytes

Format: Header, Address, Instruction=11, Length=21, 1 byte process#(0-98), 12

e(ASCII), 4 byte Edit Password, 4 byte View/Run Password,

ess layers you must use the insert, replace, and delete process

cess (Code #12)

oller to delete process# n and its associated layers.

ruct the controller to delete process# 15 the computer would

55)+Chr$(254)+Chr$(1)+Chr$

+Chr$(1)+Chr$(15)+Chr$(227)

s layer (Code #13)

roller to send the process lay

arameters for process # n layer #

the p

r parameter list is as

byte Process nam
Checksum.

To modify proc
layer instructions.

13. Delete pro

Instructs the contr

inst

Example: To
send:

Chr$(2

(12)

14. Send proces

Instructs the cont

er p

y to the host computer. A description of

rocess laye

follows:

Parameter Name

Length (bytes)

Decimal Pt.

Position

Range

Units

Process #

1

*

(0-98)

None

Layer #

2

*

(0-998)

None

Layer # n Thickness

3

3

(0-999900) Å

Layer # n Material #

1

*

(0-31)

None

Total 7 bytes

Format: Header, Address, Instruction=13, Length=3, 1 byte Process #, 2 byte
Layer #, Checksum.