INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 147)

MDC-360 DEPOSITION CONTROLLER
11-19 COMPUTER INTERFACE
Position
Source #3 Pocket
Position
1 (1-8)
Source #4 Pocket
Position 1 (1-8)
Source #1 Power 2 (0-4000), Power=99.9%*N/4000
Source #2 Power 2 (0-4000), Power=99.9%*N/4000
Source #3 Power 2 (0-4000), Power=99.9%*N/4000
Source #4 Power 2 (0-4000), Power=99.9%*N/4000
Sensor #1 Crystal
Position 1 (1-8)
Sensor #2 Crystal
Position 1 (1-8)
Sensor #3 Crystal
Position 1 (1-8)
Sensor #4 Crystal
Position 1 (1-8)
Sensor #1 Crystal Health 1 (0-99)%
Sensor #2 Crystal Health 1 (0-99)%
Sensor #3 Crystal Health 1 (0-99)%
Sensor #4 Crystal Health 1 (0-99)%
Total 33
bytes
Format: Header, Address Instruction=28, Length=0, Checksum
Example: To instruct the controller to send the controller status the computer
would send:
Chr$(255)+Chr$(254)+Chr$(1)+Chr$(28)+Chr$(0)+Chr$(227)
30. Start process (Code #29)
Instructs the controller to start process # n from starting layer # x.
Format: Header, Address, Instruction=29, Length=3, Process #(0-98) 1byte,
Starting layer #(1-999) 2 bytes, Checksum.
Example: To instruct the controller to start process # 5 on layer # 10 the
computer would send:
Chr$(255)+Chr$(254)+Chr$(1)+Chr$(29)+Chr$(3)+Chr$(4)+Chr$(0)+Ch
r$(9)+Chr$(210)
31. Send run-time values (Code #30)
Instructs the controller to send the run-time value list. A description of the run-
time
value list is as follows:
Value Name Length (bytes) Format Units