INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 84)

MDC-360 DEPOSITION CONTROLLER
5-10 OPERATING THE MDC-360
5.9.1.5 MATERIAL MEMORY CORRUPTED
The integrity of the selected material has been changed since last time the
material was modified. Each one of the material parameters has to be checked
and corrected as necessary to fix this problem.
blished
terconnection between the sensor and the controller. If the
e,
ACTION
5.9.1.6 RATE EST. ERROR
The controller is unable to establish the programmed rate within the time
specified in the Rate Establish Time parameter. The rate is considered esta
when it stays within the Rate Establish Error % for 5 seconds.
5.9.1.7 CRYSTAL FAILURE
This condition indicates lack of a valid signal from the sensor, and generally
results from a failed crystal but may also indicate problems in the crystal
mounting or the in
primary crystal fails and the process is not in deposit state, the Attention warning
will sound. If the backup crystal fails and the process is not in the deposit stat
the alarm will sound and the process will be halted.
5.9.1.8 SOURCE FAULT
This condition indicates that the correct source pocket position feedback has not
been achieved within the time set by the Rotator Delay parameter (Source Setup
Menu).
5.9.1.9 SENSOR FAULT
This condition indicates that the correct crystal position feedback has not been
achieved within the time set by the Rotator Delay parameter (Sensor Setup
Menu).
5.9.1.10 TIME POWER
This message is displayed when the controller is completing the current layer
based on the last power and rate. This occurs in the event of a crystal failure
without a backup.
5.9.1.11 RATE DEV. ALARM
The deposition rate error is greater than the rate deviation value set in the Rate
Deviation Alarm parameter.
5.9.1.12 ALARM
This message indicates the Alarm sound was initiated by an internal action.
5.9.1.13 CRYSTAL MARGINAL
The sensor crystal in use is poor in quality. If the crystal is the backup one, the
Alert warning will sound when the process is in deposit state. If the primary
crystal is in poor quality then the Attention will sound.