INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 28)

MDC-360 DEPOSITION CONTROLLER
3-4 BENCH CHECKOUT & INSPECTION
3.3.3 PROCESS PARAMETERS
Process Name Layer No. Thickness Material
Sample 1 0.400 KÅ Cr
2 1.050 KÅ Au
3.4 SIMULATE OPERATION
Testing the MDC-360 is best accomplished by checking its operation in the
Simulate mode. This mode can be selected by using the programming Main
Menu, Edit System Setup, Edit Utility Setup, to select Simulate mode ON, then
use Start to select and run a process in Simulate mode.
The Simulate mode is identical to the Normal mode except that the sensor input is
simulated. For this reason, entry to the Simulate mode will extinguish the Crystal
Failure message if it is flashing. No other difference between the Simulate mode
and the Normal mode occurs until entry to the Deposit State.
3.5 MANUAL OPERATION
Manual Mode is selected by depressing the Manual key. The LED behind the key
will light up indicating the controller is in Manual mode.
The Manual Mode is identical to the normal mode in all respects except that
source power is controlled only through the Remote Power Handset.
The Remote Power Handset has three push buttons, see Figure 3-1. Without any
of the buttons depressed, the output power is maintained at its last value.
Depressing the “PWR UP” button will increase the power, depressing the “PWR
DN” button will decrease the power and depressing the “ABORT” button will put
the controller into the Abort mode.
The Abort Mode is active whether or not the MDC-360 is in Manual Mode and
therefore can be used as a remote “panic button”.
The minimum increment by which the power is increased or decreased is 0.1%.
The Remote Power Handset can also be used to initiate a manual sensor and
crystal change by depressing both the power increase and decrease buttons
simultaneously. Each time a sensor/crystal switch is initiated, the controller will
toggle between the primary and the backup sensor/crystal combination as defined
by the active material’s parameters. The sensor/crystal switching function is only
operational when the controller is not in the Manual Mode.
3.6 INSTALLING OPTION BOARDS
Option boards are most easily installed while the MDC-360 is on the bench.
Figure 8-9 shows the location of the various option boards. Also, they are clearly
marked on the rear panel.
All Dual Source-Sensor boards are identical, as are all Discrete I/O boards. The
input-output configuration of these boards is defined by the position into which