INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 65)

MDC-360 DEPOSITION CONTROLLER
4-33
Sou
Act
Parameter/Status display.
Sound Alert -
in t
Sou
Act
Sta ger the start of the currently selected process. This action is
ignored tate.
Select Pro S oce as th process to be started by the
Start Proce de abo
Switch Crystals - Toggles between the primary and the backup sensor/crystal
combinatio
efined b tiv al.
Once the action is selected then you need to establish when the action should take
place by de
ing its c str his is in the earlier section called
Entering a Condition S
4.3.3.5 EDIT SENSOR SETUP
Selecting E Sensor ill he S Setup screen shown in Figure
4-11. In this screen you define the sensor param e controller needs to
interface to the various types of sensors. Onc nsor setup is complete, the
controller w create t ssar s and ts needed to interface to the
defined sensors. To define a sensor, fi
Up-arrow and Down-arrow keys to position the cursor on the desired sensor
num
par
nd Attention - Triggers the attention sound and displays the "Attention
ion" message in the State/Trouble field in the
Triggers the Alert sound and displays the "Alert Action" message
he State/Trouble field in the Parameter/Status display.
nd Alarm - Triggers the Alarm sound and displays the message "Alarm
ion" in the State/Trouble field of the Parameter/Status display.
rt Process - Trig
unless the controller is in the Process Ready s
cess 1-8 -
ss action
elect pr
scribed
ss #1-8
ve.
e next
n d y the ac e materi
fin ondition ing. T covered
tring.
dit Setup w present t ensor
eters that th
e the se
ill he nece y input
rst select the sensor number by using the
outpu
ber. Once selected, the sensor is configured by selecting the appropriate
ameters from the right half of the display:
PROGRAMMING AND CONTROLLER SETUP
Figure 4-11 Sensor Setup Screen
Sensor #3 Drive Up
Sensor #4 Feedback Type No Feedback
Rotator Delay(sec) 00
)
or
se
ch sensor input. And, for a multiple rotary type
6
.
Manual
Sensor Setup:
Number of Crystals
>Sensor #1< Shutter Relay Type N.O
Sensor #2 Control
1. Number of crystals (1 to 8
This parameter defines the number of crystals available for that sensor input. F
a single sensor head this would be set to one. For a dual sensor head with
separate oscillators and sensor connections, this would still be set to one becau
there is only one crystal for ea