Instruction summary, Instruction summary -4 – INFICON MDC-360 Thin Film Deposition Controller User Manual
Page 132
MDC-360 DEPOSITION CONTROLLER
11-4
COMPUTER INTERFACE
5 Invalid
message.
6
Process undefined. Can’t add layer.
7
Insufficient layer space. Can’t add layer.
8
Can’t send process log data while in process.
11.8
d instruction codes.
INSTRUCTION
SUMMARY
The following table is a list of vali
Instruction Code
Description
0
Remote activation of controller
1
Send controller c
arame
onfiguration p
ters
2 Send
utility
parameters
3
Receive utility parame
ters
4
Send controller time and date
5
Receive controller time and date
6
Send a material
7
aterial
Receive a m
8
Send a material list
9
Send number of undefined layers
10
Send a process
11
Receive a process
12
Delete a process
13
Send a process layer
14
Insert process layer
15
Replace a process layer
16
Delete a process layer
17
Send a process list
18 Send
source
setup
19
Receive source setup
20 Send
sensor
setup
21
Receive sensor setup
22
Send Input setup
23
Receive Input setup
24
Send Output setup
25
Receive Output setup
26
Send Action setup
27
Receive Action setup
28
Send controller status
29 Start
process
30
Send run-time values
31
Initiate automatic data logging
32 Internal
mmand
Co
33
Set Active Source Power
34 Internal
Command
35 Internal
Command