INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 63)

MDC-360 DEPOSITION CONTROLLER
4-31
Process - The process condition is evaluated true whenever the selected proce
the current process. ss is
r
dition is evaluated true whenever the current pocket
equals the specified pocket.
on
t
m when certain events are true.
To program an action, first select the desired action from the list of 16
the Actions screen.
Material - The material condition is evaluated true whenever the selected
material is the current material.
Sensor (1-4) - The sensor condition is evaluated true whenever the current senso
equals the specified sensor.
Crystal (1-8) - The crystal condition is evaluated true whenever the current
crystal equals the specified crystal.
Source (1-4) - The source condition is evaluated true whenever the current source
equals the specified source.
Pocket (1-8) - The pocket con
Layer (1-999) - The layer condition is evaluated true whenever the current layer#
equals the specified layer#.
4.3.3.4 PROGRAM ACTIONS
The MDC-360 provides for 16 internal user programmable actions. Internal
actions are used to provide special functions at the true evaluation of a conditi
string. These functions may be such things as terminating a deposit on an inpu
from an optical monitor. Or, sounding an alar
programmable actions displayed in
PROGRAMMING AND CONTROLLER SETUP
Onc
pre
pro
Actions: 01 Hold In State
02 Step From State
03 Sound Attention
04 Sound Alert
06 > No Action <
on
on
↓
05 Sound Alarm
07 No Acti
to select action 08 No Acti
e you have selected the required action, pressing the Right-arrow key will
sent the screen which permits programming of the action details, and this
cedure is similar to the one used for programming discrete outputs.