INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 45)

MDC-360 DEPOSITION CONTROLLER
4-13
clear when within the limit. The process will abort when the abort level is
eeded and the power is at the maximum or minimum power. exc
The final step in the initial setup of the controller is to define the processes that
i you should complete the following steps:
nter the desired
mplete.
ust be in the Process Ready state. If not,
r
asking you to press the start key again to resume the process. The process will
resume from the layer where the process was aborted starting in either the Rise to
Soak or Rise to Predeposit power states. Once in deposit, the thickness will
continue from the last value prior to the abort.
4.3 DETAILED PROGRAMMING
4.3.1 VIEW/EDIT PROCESS
Selecting View/Edit Process from the Main Menu will present the Select Process
screen to delete, copy, view or edit any one of up to 99 processes.
To select a process for viewing and editing, move the cursor onto the desired
own-arrow keys, then press the Enter key.
4.2.8 PROCESS SETUP
you w sh to run. To define a process
Select a blank process from the Select Process Screen. Please note that you can
also copy and modify a similar process to save time.
Enter a process name in the Define Process Screen.
Move the cursor onto the layer thickness parameter and e
thickness for the layer.
Select a material for the layer by moving the cursor onto the material column,
pressing the right arrow key, moving the cursor onto the desired material for
the layer and pressing the Enter key.
Repeat steps c&d until the process layers are co
4.2.9 STARTING A NEW PROCESS
To start a new process, the controller m
press abort then reset. From the ready state, press the start key, move the cursor
onto the desired process and press start again to start the process.
4.2.10 RESUMING A PROCESS FROM ABORT OR HALT
To resume an aborted process, first press the start key. A message will appea
process using the Up-arrow and D
PROGRAMMING AND CONTROLLER SETUP