INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 143)

MDC-360 DEPOSITION CONTROLLER
11-15 COMPUTER INTERFACE
Condition Name Condition Number Sub-condition Range
Controller State 128 0-25|
Input 129 0-15
Process 130 0-98
Mat 0-31 erial 131
Sensor 132 1-4
Crystal 133 1-8
Source 1-4 134
Pocket 135 1-8
Layer 136 1-999, two bytes, MSByte first
Abort 137 Not Used
Halt 138 Not Used
Hold 139 Not Used
Time Power 140 Not Used
Ready 141 Not Used
In Process 142 Not Used
Simulate 143 Not Used
Time Setpoint 144 Not Used
Last Layer 145 Not Used
Crystal Failure 146 Not Used
Crystal Marginal 147 Not Used
Min Rate&Max Pwr 148 Not Used
Max Rate&Min Pwr 149 Not Used
Rate Not Used Dev. Alarm 150
Rate Establish Error 151 Not Used
Source Fault 152 Not Used
Sensor Fault 153 Not Used
Rate Deviation Alert 154 Not Used
Max Power Alert 155 Not Used
Min Power Alert 156 Not Used
Rate Deviation Attention 157 Not Used
Max Power Attention 158 Not Used
Min Power Attention 159 Not Used
must be terminated with a null (zero).
Format: Header, Instruction=24, Length=1, Output #(0-15
e controller to send the Output setu ter list for
r would send:
Chr$(255)+Chr$(254)+Chr$ hr$(1) hr$(14)+Chr$(216)
into
All condition strings
), Checksum
Example: To instruct th p parame
Output #15 the compute
(1)+Chr$(24)+C +C
26. Receive Output setup (Code #25)
Instructs the controller to enter the incoming Output parameters for Output #n
memory. A description of the Output parameter list is given above.